Patents Assigned to Nihon Denshi Zairo Kabushiki Kaisha
  • Complex probe card for testing a semiconductor wafer
    Patent number: 4567433
    Abstract: A probe card includes a printed circuit plate having an aperture at the center thereof and a ring fixed around said aperture on either side of the plate. The ring being adapted to support probe needles in radial arrays with respect to the aperture. Each of the arrays has a multilayer of probe needles which have their terminal tips aligned on a plane in parallel with the plate and their opposite terminal ends connected to the printed circuit for external connection.
    Type: Grant
    Filed: May 23, 1984
    Date of Patent: January 28, 1986
    Assignee: Nihon Denshi Zairo Kabushiki Kaisha
    Inventors: Masao Ohkubo, Yasuro Yoshimitsu