Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to said support structure; and, a proof mass flexibly suspended by said suspension springs; wherein at least one of said suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Type:
Grant
Filed:
July 14, 2020
Date of Patent:
March 8, 2022
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Eric Hennes, Alessandro Bertolini, Johannes Franciscus Van Den Brand
Abstract: A MEMS sensor comprising preloaded suspension springs and a method for mechanically preloading suspension springs of a MEMS sensor are described. The MEMS sensor comprises a MEMS support structure; a plurality of suspension springs connected to the support structure; and, a proof mass flexibly suspended by the suspension springs; wherein at least one of the suspension springs is mechanically preloaded with a compressive force for reducing the natural frequency of said proof mass.
Type:
Grant
Filed:
December 6, 2016
Date of Patent:
July 14, 2020
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Eric Hennes, Alessandro Bertolini, Johannes Franciscus Van Den Brand
Abstract: A method for managing communication in a wireless mesh network comprising a plurality of wireless nodes and a wireless node for use in such network are described, wherein said method may comprise: providing a time slot schedule (frame), preferably a TDMA time slot schedule (frame), comprising one or more time slots, including a transmission time slot enabling a node to transmit a broadcast message, a reception time slot enabling a node to receive a broadcast message from one or more other nodes; and/or a sleep time slot for configuring said node in an idle state; and, assigning said time slots to nodes in said network on the basis of the position of said nodes in said network.
Type:
Grant
Filed:
June 6, 2014
Date of Patent:
May 19, 2020
Assignees:
STICHTING VU-VUMC, FOM-NIKHEF
Inventors:
Henk Jan Bulten, Johannes Franciscus Josephina Van Den Brand
Abstract: In an integrated two-phase accumulator controlled loop cooling system, the pumped refrigerant is employed to cool the supply of refrigerant in the accumulator vessel. No external cooling of the accumulator vessel is required, and a standard heater in the accumulator is sufficient to regulate the boiling pressure. This allows to provide a cooling system in which sub-cooling in the pump is guaranteed by the laws of nature, and which is hence more reliable, structurally simpler, better to control and cheaper.
Type:
Application
Filed:
September 9, 2011
Publication date:
August 21, 2014
Applicants:
Nikhef, CERN-European Organization for Nuclear Research