Abstract: An XY stage for precision movement for use in aligning a wafer in a microlithography system. A main stage supporting the wafer straddles a movable beam that is magnetically driven in a first linear direction in the XY plane. A follower stage, mechanically independent of the main stage, also moves in the first linear (X) direction and its motion is electronically synchronized by a control system with the main stage motion in the X direction. Electromagnetic drive motors include magnetic tracks mounted on the follower stage which cooperate with motor coils mounted on the edges of the main stage to move the main stage in a second linear (Y) direction normal to the X direction. Thus the main stage is isolated from mechanical disturbances in the XY plane since there is no mechanical connections and is lightened by removing the weight of the magnetic tracks from the beam.

Abstract: A vacuum compatible, deformable electrostatic chuck with high thermal conductivity including a membrane having a layer of dielectric material, a layer of metallic film and a layer of semiconductor material with struts and a rim formed on the layer of semiconductor material. The rim is formed on the periphery of the layer of semiconductor material. The rim and struts contact a surface of a supporting structure forming a hollow area in which a coolant gas may be circulated. The supporting structure has gas manifold holes to connect the hollow area with a source of coolant gas. In a first embodiment, the struts have a rectangular cross section and are formed as a continuous structure from a first point on the rim to a second point on the rim. In a second embodiment, the struts are flexure struts having a first section with a rectangular cross section and a second section formed as a truncated cone or a pyramid.

Abstract: Regular windings for use in an armature in an electric motor. Windings, each having approximately the same shape as a regular winding, may be overlapped to increase a conductor density within a volume encompassing portions of the windings by having a portion of each winding at least partially fill an aperture of an adjacent overlapping winding. The windings are associated with phases used to operate an electric motor. The windings and armature should be particularly useful in linear electric motors and in steppers used in semiconductor manufacture. Windings of the same shape improve manufacturability of the armature and electric motor. High conductor densities in the windings significantly improve efficiency of the electric motor.

Abstract: The invention includes a two-dimensional electric motor having two arrays of permanent magnets and at least two coils. The arrays of permanent magnets each have north and south poles distributed in both longitudinal and latitudinal directions along a plane. North poles in the first array are aligned with south poles in the second array, and south poles in the first array are aligned with north poles in the second array. The coil has a portion between the two arrays of permanent magnets. In another embodiment, the two-dimensional electric motor has an array of permanent magnets and two sets of two coils. The two sets of two coils are positioned on two different sides of the array. The invention permits simpler control methods, more stable motion, increased efficiency, and reduced stray magnetic fields. The invention should be particularly useful in semiconductor processing equipment.