Abstract: The present invention relates to a photographing control device, microscope and program that can simply confirm whether time lapse photography is being executed normally or not. A number of a display target round, time required for processing of the round, and the operation state of each device of an inverted microscope and a camera in the round, are displayed in a window 431 on a photographed result display screen 421 that displays the photographed result of the time lapse photography. The individual operation time of the each device of the inverted microscope and the camera from the start of the processing of a photographing point selected in a list box 433 to the completion of the photographing of a channel selected in a list box 434, is displayed in a window 435. When an image button is pressed, the image of a photographed sample is displayed. The present invention can be applied to software for controlling time lapse photography using a microscope, for example.

Abstract: An exposure apparatus which exposes a substrate by projecting an image of a pattern, via an projection optical system and a liquid of a liquid immersion area formed on the substrate, onto the substrate, includes a liquid supply mechanism having supply ports for supplying the liquid on both sides of a projection area respectively and capable of simultaneously supplying the liquid from the supply ports, the image of the pattern being projected onto the projection area. The liquid supply mechanism supplies the liquid from only one of the supply ports disposed on the both sides when the mechanism starts to supply the liquid. The liquid may be supplied while moving an object such as a substrate placed to face the projection optical system. Accordingly, an optical path space on the image side of the projection optical system can be filled with the liquid quickly while suppressing formation of air bubbles.