Abstract: The present invention provides an apparatus for rapid ellipsometry. The apparatus contains a light source, a polarizer, a sample stage, an integrated polarization analyzer, and a detector assembly. The light emitted by light source is polarized by the polarizer and shines on the sample mounted on sample stage. The light is reflected from the sample surface and passes through the integrated polarization analyzer. The analyzer contains multiple polarizers with different polarization angles from 0 to 180 degrees for transmitting light from the sample. The detector assembly includes multiple detectors corresponding one-to-one with the multiple polarizers, for independently determining the light intensity transmitted by each polarizer. The current invention provides a rapid ellipsometry apparatus that is highly efficient, with the fastest acquisition time down to nanosecond scale for obtaining dynamic parameters of the sample.

Abstract: A material transport property measurement system includes an ellipsometry system, a heat capacity measurement system, and a controller. The ellipsometry system has a light source to generate a light which passes through a polarizer and shines on a sample. The sample reflects the light to an integrated polarization analyzer, which includes multiple polarizers with different polarization angles distributed from 0 to 180 degrees. A detector assembly includes multiple detectors corresponding to the multiple polarizers to detect light passing through the respective polarizers and generate multiple first electrical signals. The heat capacity measurement system measures a temperature parameter of the sample using a non-contact method, and outputs a second electrical signal. The controller analyzes the second and the multiple first electrical signals to obtain the transport properties of the material. A material transport property measurement method is also provided.