Patents Assigned to Ninon Shinku Gijutsu Kabushiki Kaisha
  • Method and apparatus for gas phase synthesis
    Patent number: 5276503
    Abstract: A method of gas phase synthesis including the steps of measuring, by ellipsometry, optical properties of a surface of a sample on which a film is formed during formation of the film, and of evaluating the density of nucleation from changes in ellipsometric parameter angles during formation of of the film.
    Type: Grant
    Filed: October 31, 1991
    Date of Patent: January 4, 1994
    Assignee: Ninon Shinku Gijutsu Kabushiki Kaisha
    Inventors: Yasuaki Hayashi, Yukinobu Hibino