Patents Assigned to NIPPO PRECISION CO., LTD
  • Patent number: 9671459
    Abstract: A maintenance carriage of a wafer inspection apparatus can easily unload a test head. A wafer inspection apparatus 10 includes a cell tower 12 in which cells 11 are arranged at four levels, and each of the cells 11 accommodates a test head 15. At an outside of the cell tower 12, a maintenance carriage 27 is arranged. The maintenance carriage 27 includes a carriage base 29 configured to be moved through rollers 28; a test head case 31 configured to accommodate the test head 15; a lift device 30 provided uprightly from the carriage base 29 and configured to move up and down the test head case 31; and a horizontal position adjusting stage 35 provided between a lifter 34 of the lift device 30 and the test head case 31 and configured to move the test head case 31 horizontally with respect to the lifter 34.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: June 6, 2017
    Assignees: TOKYO ELECTRON LIMITED, NIPPO PRECISION CO., LTD
    Inventors: Junichi Hagihara, Shigekazu Komatsu, Kunihiro Furuya, Tadayoshi Hosaka, Naoki Muramatsu