Patents Assigned to NISHI AND MURAI
  • Publication number: 20010041513
    Abstract: In the wafer chamfering method, there is used a disk-shaped grindstone 8 which includes: a peripheral edge portion serving as a grinding surface 1; a flat portion formed in the central portion of the grinding surface 1 in the width direction thereof; and, two edge portions 5 respectively formed on the two sides of the flat portion 2 in the width direction thereof and made in the form of the shape of the valley portion of the notch portion 4 of a disk-shaped wafer 3 to be chamfered. In operation, in the wafer chamfering method, while rotating the above grindstone 8, the grindstone 8 is revolved in the thickness direction of the wafer 3 to thereby chamfer the wafer 3.
    Type: Application
    Filed: April 13, 1999
    Publication date: November 15, 2001
    Applicant: NISHI AND MURAI
    Inventors: KENICHIRO NISHI, SHIROU MURAI