Patents Assigned to NISSIN ION EUQIPMENT CO., LTD.
  • METHOD FOR NEUTRALIZING ION BEAM, AND APPARATUS USING THE METHOD
    Publication number: 20200051801
    Abstract: A method and apparatus are provided. The method includes selectively supplying a neutralizing gas to a position on a trajectory of an ion beam between an extraction electrode system and an analysis slit based on a composition of a dopant gas introduced into an ion source that produces the ion beam. The apparatus includes the ion source, the extraction electrode system, the analysis slit, and a gas supply system that selectively supplies the neutralizing gas to the position on the trajectory.
    Type: Application
    Filed: March 14, 2019
    Publication date: February 13, 2020
    Applicant: NISSIN ION EUQIPMENT CO., LTD.
    Inventor: Yusuke KUWATA