Abstract: A system and method are described for an image registration system and method including a registration engine that receives complex image data for corresponding images. The registration engine generates a correlation map between the complex image pair for relative translation by calculating an inverse of the complex conjugate product of the frequency data of the first image and the frequency domain data of the second, corresponding, image. The frequency domain data may be obtained using Fast Fourier transform-based techniques.
Type:
Grant
Filed:
September 7, 2001
Date of Patent:
March 29, 2005
Assignee:
nLine Corporation
Inventors:
X. Long Dai, Martin A. Hunt, Bichuan Shen
Abstract: In the present disclosure a system and method are described for removing fixed pattern noise. The system includes a positioning system for holding and positioning a target, an optical system for capturing images or the target, and a fixed pattern noise removal engine for identifying and removing fixed pattern noise. The fixed pattern noise removal engine preferably identifies fixed pattern noise by analyzing a reference image and target image.
Abstract: The present invention discloses a positioning system that includes at least three positioner assemblies. Each positioner assembly includes a housing with a coarse adjustment assembly and a fine adjustment assembly disposed within the housing. The positioner assemblies are releasably coupled to a wafer chuck and operable to selectively position the chuck. More particularly, the fine adjustment assembly includes a piezoelectric actuator that is selectively movable between a retracted position and an extended position.
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