Abstract: A finely pulverized alkaline earth metal oxide or an alkali metal oxide is added to perfluoropolyether oil represented by the general formula Rf[CF(CF.sub.3)CF.sub.2 O].sub.5.about.60 Rf, to absorb HF generated by decomposition of the perfluoropolyether at radioactive or energy irradiation of the perfluoropolyether oil, thereby effectively suppressing diffusion of HF into the oil or the gas phase.