Abstract: A Pendulum Valve having Independently and Rapidly Controllable Theta- and Z-axis Motion. The valve actuator used in the present invention provides the benefit of wide open unrestricted flow of a pendulum valve coupled with the high-resolution and wide dynamic range flow throttling of a ball or butterfly valve. The actuator mechanism will include motor drives and associated control system so that the drives are closely coupled to give highly controlled motion. The drive assembly introduces a concentric shaft arrangement that, when coupled with the highly controllable motor drives, exploits a cam-follower arrangement to make the relative rotation between the two concentric shafts result in highly controlled theta and z-axis motion. Finally, the plate to seal spacing afforded is greater than previously possible with prior valve actuator mechanisms, thereby substantially reducing flow turbulence through the valve as the valve plate eclipses the valve ports.

Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).

Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components).

Abstract: A valve 10 is provided which has two pathways which each extend between an inlet bore 4 and an outlet bore 6 of the valve 10. A soft start passage 55 initially opens to equalize pressure between the inlet bore 4 and the outlet bore 6. A main poppet or other barrier 50 then opens to provide direct communication of large volumes of gas between the inlet bore 4 and the outlet bore 6. A pneumatic cylinder 20 has a single piston 30 therein which is moved downward to actuate a soft start shaft 40 and associated soft start poppet 45 to open the soft start passage 55. When air is directed into a lower air chamber 28 below the piston 30, the piston 30 is caused to be elevated within the pneumatic cylinder 20 and the entire soft start shaft 40 and main poppet 50 assembly moves up to provide direct access of larger volumes of gas between the inlet bore 4 and the outlet bore 6.