Abstract: The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
Type:
Grant
Filed:
January 5, 2005
Date of Patent:
December 25, 2007
Assignee:
Norcada Inc.
Inventors:
Yuebin Ning, Graham Hugh McKinnon, Cameron Raymond Howey, Michael John Colgan
Abstract: The present invention provides a micro-electromechanical relay that can produce low electrical contact resistance, and is capable of mechanical latching. More specifically, the present invention combines the clamping actions of cantilever beams with a movable shuttle-like spacer to generate high contact forces at the metal-metal contacts of the micro-electromechanical relay, thereby producing a very low electrical contact resistance and a mechanism for mechanical latching. Methods of fabricating the micro-electromechanical relay are also provided in this invention, which offer the advantages of both design and fabrication flexibilities by processing the top and bottom substrates separately prior to joining them together.
Type:
Application
Filed:
January 5, 2005
Publication date:
July 6, 2006
Applicant:
Norcada Inc.
Inventors:
Yuebin Ning, Graham McKinnon, Cameron Howey, Michael Colgan