Patents Assigned to Norihiro Kiuchi
  • Patent number: 5903006
    Abstract: A liquid concentration detecting apparatus which permits a real-time and high-accuracy detection of concentration of a liquid (particularly an etching or cleaning solution) used in a semiconductor plant, with a simple configuration at a low cost. The liquid concentration detecting apparatus 1 has a cell 2 to which a liquid is supplied, and a projecting section 4 and a receiving section 5 arranged opposite to each other in a direction at right angles to the axial line of the cell. A light of a prescribed wavelength is projected from this projecting section 4 through the liquid in the cell 2 to the receiving section 5, and the concentration of the liquid is determined by detecting the amount of light received by the receiving section.
    Type: Grant
    Filed: May 27, 1997
    Date of Patent: May 11, 1999
    Assignee: Norihiro Kiuchi
    Inventors: Norihiro Kiuchi, Kunimitsu Tamura, Seiki Tsurudo