Abstract: A microelectronic supercapacitor is amenable to being fabricated using micro electromechanical systems (MEMS) techniques. By utilizing MEMS techniques, the supercapacitor in accordance with the present invention can be formed with volumes <1 mm3. As such, such microelectronic supercapacitor is suitable for use in applications in which only a few millimeters are available for both a supercapacitor and an energy storage device, such as a battery.
Type:
Grant
Filed:
September 5, 2001
Date of Patent:
September 16, 2003
Assignees:
Northrop Grumman Corporation TPL, Inc., TPL, Inc., California Institute of Technology
Inventors:
David H. Lewis, Jr., John J. Waypa, Erik K. Antonsson, Charles D. E. Lakeman