Abstract: In apparatus for controlling the treatment of a workpiece by a beam emanating from a source, there is translational relative movement in two orthogonal directions between the beam and the workpiece support element, and control of velocity in one (control) direction occurs in response to a detector, mounted behind the support, which periodically samples the beam through a moving slot in the support element. This slot extends over the range of movement in the control direction. An ion implanter is shown in which the support element is a constantly spinning disk the axis of which is translated in the control direction. Another ion implanter is shown in which the support element is a moving belt. A simple control circuit, useful for both embodiments, achieves a uniform ion dosage upon semiconductor substrates at a high production rate despite variations in beam intensity. The detector is not affected by a shower of electrons upon the support that neutralizes charge on the workpieces.

Abstract: Apparatus for directing a beam at a workpiece in vacuum has a special planar sliding multiple seal arrangement that enables repeated scanning movement of the workpiece across the beam. The seal includes a planar slide plate and an opposed relatively movable seal support member, also preferrably a plate parallel to the slide plate. Aligned apertures are in the members, one of which is larger in the direction of relative movement than the other enabling the relative movement while maintaining the alignment. A plurality of concentric resilient seals, which may be of oval race track configuration, bear with a sliding contact against the planar surface, these seals preferably comprising composites of a thin high density polyethylene seal element and a soft and only milding compressed backing element that applies a feather-light seal pressure. Between-seal pumping is provided to reduce the differential pressure across any seal to to remove gas that may leak into the space.

Abstract: Ion implantation equipment of the spinning disk type has an automated disk exchange system employing a pair of arms that interchange disks between a pair of exchange stations. One exchange station is defined by a back cover of a target chamber that hinges down. The disk drive motor is mounted on that cover and introduces water cooling for the disk through the drive shaft. Heat conductive elastomeric material interposed between the disk and its support on the shaft ensures good heat transfer from the disk in a high vacuum environment. The exchange system employs linear and rotary actuators of the fluid cylinder type, and the pickup head employs a pneumatic robot that operates a toggle clamp that secures the disk for its scanning rotation.