Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).
Type:
Grant
Filed:
February 12, 2010
Date of Patent:
November 13, 2012
Assignee:
NT-MDT Service & Logistics Ltd.
Inventors:
Andrey Bykov, Vladimir Kotov, Viktor Bykov
Abstract: The invention relates to a multifunctional scanning probe microscope comprising: a base (1); a preliminary approach unit (3) movably mounted on the base (1); a piezo-scanner (4) disposed on the preliminary approach unit (3); an object holder (5) disposed on the piezo-scanner (4); a sample (6) which comprises a measuring area (M) and is attached to the piezo-scanner (4) with the aid of the object holder (5); a platform (9) attached to the base (1) opposite the sample (6); an analyzer mounted on the platform (9) and comprising a first measuring head (13) which is oriented towards the sample (6) and is adapted for probing the measuring area (M) of the sample (6).
Type:
Application
Filed:
February 12, 2010
Publication date:
December 1, 2011
Applicant:
NT-MDT SERVICE & LOGISTICS LTD.
Inventors:
Andrey Bykov, Vladimir Kotov, Viktor Bykov