Abstract: A molecular beam epitaxy apparatus includes a radical generator for generating a radical species, a molecular beam cell for generating a molecular beam or an atomic beam, and a vacuum chamber for accommodating a substrate therein, in use, the substrate being irradiated with the radical species and the molecular beam or the atomic beam in vacuum, to thereby form, on the substrate, a crystal of a compound derived from the element of the radical species and the element of the molecular beam or the atomic beam.

Abstract: A radical generator includes a supply tube, a plasma-generating tube, a coil winding about an outer circumference of the plasma-generating tube, for generating an inductively coupled plasma in the plasma-generating tube, an electrode for generating a capacitively coupled plasma in the plasma-generating tube and adding the capacitively coupled plasma to the inductively coupled plasma, and a parasitic-plasma-preventing tube including a dielectric material which extends from a bottom of the plasma-generating tube to an opening of the supply tube in a space between the bottom and the opening, and a tip part thereof is inserted into the supply tube to cover an inner wall of the supply tube for preventing a generation of a parasitic plasma between the electrode and the inner wall of the supply tube.

Abstract: To provide a plasma generator having plasma-generating zone of increased volume. A plasma generator 110 has a cylindrical casing 11 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 11 has a slit-like gas inlet 11i and a plurality of cylindrical gas outlets 11o. From the gas inlet 11i to the top of the plasma-generating zone P, the slit width (the front-to-back direction with respect to the sheet of FIG. 2.A, and the left-to right direction in FIG. 2.B) is adjusted to 1 mm, and gas outlets 11o each having an inner diameter of 1 to 2 mm are formed in straight line along the longitudinal direction of the plasma-generating zone P. The plasma-generating zone P has a square cross-section normal to the longitudinal direction having a side of 2 to 5 mm. Each of the surfaces of the electrodes 2a, 2b facing each other has a plurality of recesses (hollow portions).

Abstract: The multi-micro hollow cathode light source has a cathode plate, an insulation plate, an anode plate, and metal pieces. The insulation plate is sandwiched by the cathode plate and the anode plate. The cathode plate is made of copper. The centers of the cathode plate, insulation plate, and anode plate, are provided with holes, respectively. The holes form a penetrating though-hole. Linear slots are disposed in the cathode plate continuously extending from the hole in a cross shape. Each slot penetrates the cathode plate. Four metal pieces made of materials different from one another are inserted and buried in the four slots.

Abstract: [Object] To provide a radical generator which can produce radicals at higher density. [Means for Solution] The radical generator includes a supply tube 10 made of SUS, a hollow cylindrical plasma-generating tube 11 which is connected to the supply tube 10 and which is made of pyrolytic boron nitride (PBN). A cylindrical CCP electrode 13 is disposed outside the plasma-generating tube 11. A coil 12 is provided so as to wind about the outer circumference of the plasma-generating tube at the downstream end of the CCP electrode 13. A parasitic-plasma-preventing tube 15 made of a ceramic material is inserted into an opening of the supply tube 10 at the connection site between the supply tube 10 and the plasma-generating tube 11.

Abstract: A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.

Abstract: A graphene production apparatus 100 has a vessel 10 and, attached thereto, an immersion electrode 20 and a non-immersion electrode 30. The immersion electrode has an electrode covering 20c and an electrode main body 20e, and the non-immersion electrode has a covering 30c and an electrode main body 30e. An argon-feeding conduit 40 is disposed so as to inject argon into the vessel 10 around the electrode main body 30e. Ethanol is supplied in such an amount that the liquid surface completely covers the electrode main body 20e of the immersion electrode 20 and does not reach the electrode main body 30e of the non-immersion electrode 30. The electrode main body 20e is formed from, for example, iron, nickel, or cobalt.

Abstract: To provide a light source which realizes accurate determination of the particle density of a plasma atmosphere without disturbing the state of the plasma atmosphere. The light source of the invention includes a tubular casing 12; a cooling medium passage 30 for causing a cooling medium to flow therethrough, the passage being provided along the inner wall of the casing; a lens 50 provided at a tip end of the casing; a first electrode 44 and a second electrode 45 which are provided in the casing and before the lens so as to be vertical to the axis of the casing and parallel to each other; and an insulating spacer 46 provided between the first electrode and the second electrode.

Abstract: A spectroscopy method, includes guiding pulse laser light to an optical fiber, which mutually reacts with a sample to be measured of a light absorptance characteristic, outputting ring down pulse light obtained through light absorption of the sample, measuring an absorptance characteristic of the sample based on an attenuation characteristic of the ring down pulse light, and setting the pulse laser light as wide-spectrum laser light, setting the optical fiber as a strong dispersive optical fiber, and increasing a pulse width of the ring down pulse light to measure a wavelength absorptance characteristic based on a ring down attenuation constant of a pulse train with respect to a time sequence corresponding to a wavelength.

Abstract: To provide a plasma generator having a plasma-generating zone of an increased volume. A plasma generator 100 has a casing 10 made of a sintered ceramic produced from alumina (Al2O3) as a raw material. The casing 10 has a slit-like gas intake section 12, and a gas discharge section 20 in which a plurality of holes are disposed in a line. From the gas intake section 12 to the top of a plasma-generating zone P, the slits have a width of 1 mm. There is provided a second gas discharge section 22 including holes 24 which have a diameter of 0.5 mm and a length of 16 mm and which are arranged in a line along the longitudinal axis of the plasma-generating zone P. The plasma-generating zone P has a cross-section which is a rectangle having a side of 2 to 5 mm. Electrodes 2a, 2b are provided with hollow portions on the surfaces thereof facing each other. A power sources supplies about 9 kV, which is obtained by boosting 100 V (60 Hz) and is applied to the electrodes 2a, 2b with a current of 20 mA.

Abstract: To achieve an apparatus capable of measuring a light absorption coefficient f a sample with high sensitivity. A ring down spectroscope uses a wavelength-variable femtosecond soliton pulse light source 1. Pulse light is input to a loop optical fiber 6 through a first light waveguide 4 and a wavelength selective switch 5. Ring down pulse light is input to a homodyne detector through the wavelength selective switch 5. On the other hand, pulse light propagating in the first light waveguide 4 is split and input to light waveguides constituting a second light waveguide 20 through an optical directional coupler 8 and a first optical switching element 12. The pulse light propagating in the second light waveguide 20 is input to the homodyne detector as reference light and used for synchronous detection. The plural light waveguides constituting the second light waveguide 20 differ in optical length in accordance with the length of the optical fiber 6, and can slightly change the optical length.

Abstract: According to the present invention, a long electric discharge path is formed, and a workpiece is irradiated with an atmospheric plasma of a long rectangular area. An argon flow at a first gas outlet forms argon plasma by high-frequency electric power between the first and second electrodes, and the plasma is jetted as an auxiliary plasma in the longitudinal direction from the left end of a primary plasma-generating zone. Another argon flow at a second gas outlet forms argon plasma by high-frequency electric power between the third and fourth electrodes, and the plasma is jetted as an auxiliary plasma in the longitudinal direction from the right end of the primary plasma-generating zone. When high-frequency electric power is applied to the first and third electrodes, electric discharge occurs between two argon plasmas flowing from both ends of the primary plasma-generating zone. Through the electric discharge, the discharge state is maintained in the entire primary plasma-generating zone.

Abstract: Disclosed is a particle density measuring probe for measuring the density of atoms or molecules in a plasma atmosphere by absorption spectroscopy. The probe has a cylindrical light guiding member provided in the plasma atmosphere. At the front end of the light guiding member, there is provided a reflection plate for reflecting light that has propagated through the cylindrical light guiding member. Behind the reflection plate, in a cross section perpendicular to the longitudinal direction of the light guiding member, a part devoid of a portion of wall surface is provided by a predetermined length in the longitudinal direction. A plasma introducing portion allows mutual contact between light passing through this part devoid of a portion of wall surface and atoms or molecules in the plasma atmosphere. The probe has a main body that guides light in an axial direction by total reflection by a side wall, and that is located behind the plasma introducing portion.

Abstract: An atomic analyzer includes a plasma generator, in which a discharge gas is fed in a micro gap between a pair of electrodes to generate nonequilibrium atmospheric pressure plasma, a bias voltage controller that includes a plasma-leading electrode for leading the nonequilibrium atmospheric pressure plasma generated by the plasma generator to an object to be irradiated, the object to be irradiated with the nonequilibrium atmospheric pressure plasma is placed on the plasma-leading electrode, a bias voltage is applied between the plasma-leading electrode and the electrodes of the plasma generator to irradiate the object with the nonequilibrium atmospheric pressure plasma, and a spectrometer that analyzes atoms spectroscopically from light emitted from atomized generated by atomizing a substance composing the object to be irradiated by the nonequilibrium atmospheric pressure plasma irradiation or from light absorbed by the atomized atoms.

Abstract: Disclosed is a particle density measuring probe for measuring the density of atoms or molecules in a plasma atmosphere by absorption spectroscopy. The probe has a cylindrical light guiding member provided in the plasma atmosphere. At the front end of the light guiding member, there is provided a reflection plate for reflecting light that has propagated through the cylindrical light guiding member. Behind the reflection plate, in a cross section perpendicular to the longitudinal direction of the light guiding member, a part devoid of a portion of wall surface is provided by a predetermined length in the longitudinal direction. A plasma introducing portion allows mutual contact between light passing through this part devoid of a portion of wall surface and atoms or molecules in the plasma atmosphere. The probe has a main body that guides light in an axial direction by total reflection by a side wall, and that is located behind the plasma introducing portion.

Abstract: [Object] To identify and quantitate an atom of a solid element contained in sludge, waste fluid, or soil. [Solving Means] An atomic analyzer includes a plasma generator 10 in which a discharge gas is fed in a micro gap between a pair of electrodes to generate nonequilibrium atmospheric pressure plasma; a bias voltage controller that includes a plasma-leading electrode 21 for leading the nonequilibrium atmospheric pressure plasma generated by the plasma generator to an object to be irradiated 22, the object to be irradiated with the nonequilibrium atmospheric pressure plasma being placed on the plasma-leading electrode, a bias voltage being applied between the plasma-leading electrode and the electrodes of the plasma generator to irradiate the object with the nonequilibrium atmospheric pressure plasma; and a spectrometer that atomizes a substance composing the object to be irradiated by the nonequilibrium atmospheric pressure plasma irradiation to analyze the atoms by absorption spectrometry.

Abstract: To provide a novel method for producing carbon nanowalls and an apparatus suitable for carrying out the method. A source gas 32 containing carbon is introduced into a reaction chamber 10. The reaction chamber 10 includes a parallel plate-type capacitively coupled plasma (CCP) generator 20 including a first electrode 22 and a second electrode 24. The irradiation of electromagnetic waves plasmatizes the source material 32 to create a plasma atmosphere 34. In a radical-generating chamber 41 disposed outside the reaction chamber 10, hydrogen radicals 38 are generated by decomposing radical source gas 36 containing hydrogen using RF waves or other waves. The hydrogen radicals 38 are introduced into the plasma atmosphere 34, whereby carbon nanowalls are formed on a substrate 5 disposed on the second electrode 24.