Abstract: An apparatus for analyzing certain properties of an object with a beam of radiation capable of emitting fluorescent x-rays by (1) aligning a pivotally mounted radiation-emitting generator with a pivotally mounted radiation detector relative to a specific point on the object by providing for a beam of visible light to be separately directed from the generator and detector, (2) generating and projecting a beam of radiation against a selected portion of the object, which includes the points to be analyzed, causing the object point to become stimulated to emit its own radiation, (3) detecting this object-emitted beam of radiation by the detector and (4) analyzing the spectrum of the detected beam.

Abstract: An electron beam from an electron column instrument impinges on a target foil to produce a primary X-ray beam which, in turn, passes through a collimator to impinge on a specimen. The X-rays fluoresced from the specimen by the primary X-ray beam are detected by a solid state radiation detection device.