Patents Assigned to NuFlare Technology, Inc.
  • Patent number: 10483082
    Abstract: An evaluation method according to an embodiment is to evaluate a precision of an aperture formed with multiple openings, and includes steps of forming a first evaluation pattern based on evaluation data using multiple electron beams generated by electron beam that has passed through the aperture, dividing the aperture into multiple regions, each of the regions including the multiple openings and defining the multiple divided regions, forming a second evaluation pattern based on evaluation data using the electron beam that has passed through a first divided region among the multiple divided regions, comparing the first evaluation pattern with the second evaluation pattern, and evaluating the precision of the aperture based on the comparison result between the first evaluation pattern and the second evaluation pattern.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: November 19, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Rieko Nishimura
  • Patent number: 10483087
    Abstract: In one embodiment, a multi charged particle beam writing apparatus includes a blanking plate including a plurality of blankers, bitmap generation processing circuitry generating bitmap data for each writing pass of multi-pass writing, the bitmap data specifying irradiation time periods for a plurality of irradiation positions, a plurality of dose correction units configured to receive bitmap subdata items obtained by dividing the bitmap data from the bitmap generation processing circuitry, and correct the irradiation time periods to generate a plurality of dose data items corresponding to respective processing ranges, and data transfer processing circuitry transferring the plurality of dose data items to the blanking plate through a plurality of signal line groups. Each of the signal line groups corresponds to the blankers located in a predetermined region of the blanking plate.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: November 19, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Kei Hasegawa, Hayato Kimura, Ryoh Kawana
  • Patent number: 10483088
    Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an aperture plate forming multiple beams, a stage on which a writing target substrate is placed, a stage position detector detecting the position of the stage, an inspection aperture plate provided in the stage, the inspection aperture plate permitting one of the multiple beams to pass through the inspection aperture plate, a deflector deflecting the multiple beams, a current detector detecting a beam current of each of the multiple beams scanned over the inspection aperture plate in X and Y directions and passed through the inspection aperture plate, and a control computer generating a beam image based on the detected beam currents and calculating positions of the beams based on the beam image and the position of the stage.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: November 19, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Osamu Iizuka, Yukitaka Shimizu
  • Publication number: 20190346769
    Abstract: According to one aspect of the present invention, a pattern inspection apparatus includes an inspected image acquisition mechanism configured to acquire an inspected image of a figure pattern formed on an inspection target object, using an electron beam; a reference image generation processing circuit configured to generate a reference image corresponding to the inspected image; a contour data generation processing circuit configured to generate contour data defining a contour line of the figure pattern; a comparison processing circuit configured to compare the inspected image and the reference image and determine whether there is a defect based on a result of a comparison; and a defect selection processing circuit configured to select a defect within a range preset based on the contour line as a valid defect, from at least one defect determined to be a defect by the comparison, using the contour data.
    Type: Application
    Filed: May 1, 2019
    Publication date: November 14, 2019
    Applicant: NuFlare Technology, Inc.
    Inventors: Hideaki Hashimoto, Riki Ogawa, Masataka Shiratsuchi, Ryoichi Hirano
  • Patent number: 10475621
    Abstract: A drawing device according to an embodiment includes: a stage configured to be capable of having a processing target mounted thereon; an aperture member including a plurality of apertures corresponding to a plurality of beams irradiated to the processing target; a data generator configured to generate gradation data indicating irradiation time data with n bits (n is a positive integer) with respect to positions of respective coordinates of the beams; a calculator configured to perform a logical addition operation of the gradation data of the respective positions of the coordinates; and a controller configured to control the aperture member based on the gradation data and a result of the logical addition operation.
    Type: Grant
    Filed: May 29, 2018
    Date of Patent: November 12, 2019
    Assignee: NUFLARE TECHNOLOGY, INC.
    Inventors: Kei Hasegawa, Hayato Kimura, Hideo Inoue, Yoshiaki Onimaru
  • Patent number: 10468232
    Abstract: A charged particle beam writing apparatus includes a writing data generation circuitry to input character information or information of an item selected, for specifying an apparatus quality check pattern used for evaluating apparatus quality of a charged particle beam writing apparatus, and to generate writing data of the apparatus quality check pattern based on the character information or the information of the item selected, and a combination circuitry to input writing data of an actual chip pattern to be written on a target object, and to combine the writing data of the actual chip pattern and the writing data of the apparatus quality check pattern such that the actual chip pattern and the apparatus quality check pattern do not overlap with each other.
    Type: Grant
    Filed: June 5, 2018
    Date of Patent: November 5, 2019
    Assignee: NUFLARE TECHNOLOGY, INC.
    Inventors: Satoru Hirose, Rieko Nishimura, Ryosuke Ueba
  • Publication number: 20190333734
    Abstract: In one embodiment, a charged particle beam writing apparatus includes a storage storing coefficients of a calculation formula for calculating a correction amount of a beam emission position according to an atmospheric pressure, a correction amount calculator calculating a correction amount of the beam emission position from a measured value of an atmospheric pressure sensor and the calculation formula using the coefficients, a writer writing a pattern on a substrate using a charged particle beam with the beam emission position adjusted based on shot data and the correction amount, a correction residual calculator calculating a correction residual for the emission position of the charged particle beam using a result of detection by a detector, and an updater updating the coefficients, when there is correlation between change in the correction residual and change in the atmospheric pressure.
    Type: Application
    Filed: April 10, 2019
    Publication date: October 31, 2019
    Applicant: NuFlare Technology, Inc.
    Inventor: Hideki Matsui
  • Patent number: 10460909
    Abstract: In one embodiment, a charged particle beam writing apparatus includes a current limiting aperture, a blanking deflector switching between beam ON and beam OFF so as to control an irradiation time by deflecting the charged particle beam having passed through the current limiting aperture, a blanking aperture blocking the charged particle beam deflected by the blanking deflector in such a manner that the beam OFF state is entered, and an electron lens disposed between the current limiting aperture and the blanking aperture. A lens value set for the electron lens is substituted into a given function to calculate an offset time. The offset time is added to an irradiation time for writing a pattern to correct the irradiation time. The blanking deflector switches between the beam ON and the beam OFF based on the corrected irradiation time.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: October 29, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Haruyuki Nomura
  • Patent number: 10460902
    Abstract: In one embodiment, a charged particle beam writing apparatus includes a blanking circuit applying a blanking voltage to a blanking deflector, a stage on which a substrate is placed, a mark on the stage, a detector detecting an irradiation position of the charged particle beam based on irradiation of the mark with the charged particle beam, and a diagnostic electric circuitry that causes the charged particle beam to enter a predetermined defocused state relative to the mark, obtains a difference between a first irradiation position when the mark is scanned under first irradiation conditions and a second irradiation position when the mark is scanned under second irradiation conditions in which at least either of irradiation time and settling time in the first irradiation conditions is varied, and determines occurrence of a failure of the blanking circuit when the difference is a predetermined value or more.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: October 29, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Takahito Nakayama
  • Patent number: 10460908
    Abstract: A multiple charged particle beam writing apparatus includes a circuitry to calculate, for each of the plurality of combinations, a first distribution coefficient for each of the three beams configuring the combination concerned, for distributing a dose to irradiate the design grid concerned to the three beams such that the gravity center position of each distributed dose coincides with the position of the design grid concerned and the sum of the each distributed dose coincides with the dose to irradiate the design grid concerned; and a circuitry to calculate, for each of the four or more beams, a second distribution coefficient of each of the four or more beams relating to the design grid concerned by dividing the total value of at least one first distribution coefficient corresponding to the beam concerned in the four or more beams by the number of the plurality of combinations.
    Type: Grant
    Filed: August 1, 2018
    Date of Patent: October 29, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Hiroshi Matsumoto
  • Patent number: 10460435
    Abstract: A pattern inspection method includes calculating a first coefficient of a filter function by using data of optical images of plural small regions selected and data of developed images of the plural small regions based on design data; calculating a second coefficient of a filter function by using data of an optical image of a reference small region selected and data of a developed image of the reference small region selected; and determining, for each pixel, whether there exists a pixel for which a difference, between a first temporary reference image to be compared with the optical image of the reference small region generated using the filter function in which the first coefficient is defined and a second temporary reference image to be compared with the optical image of the reference small region generated using the filter function in which the second coefficient is defined, is larger than a threshold.
    Type: Grant
    Filed: April 5, 2017
    Date of Patent: October 29, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Takafumi Inoue
  • Patent number: 10453652
    Abstract: A multiple charged particle beam writing apparatus includes a distribution coefficient calculation circuitry to calculate, using defective beam information based on which a defective beam can be identified, for each design grid in a plurality of design grids being irradiation positions in design of multiple charged particle beams, a distribution coefficient for each of three or more beams, for distributing a dose to irradiate a design grid concerned in the plurality of design grids to the three or more beams, excluding the defective beam, whose actual irradiation positions are close to or approximately coincident with the design grid concerned, such that the position of the gravity center of each distributed dose coincides with the position of the design grid concerned and the sum of each distributed dose after distribution coincides with the dose to irradiate the design grid concerned.
    Type: Grant
    Filed: August 2, 2018
    Date of Patent: October 22, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Hiroshi Matsumoto
  • Patent number: 10451976
    Abstract: An electron beam irradiation apparatus includes a first electrode being annular, arranged along the optical axis of the electron beam, at the downstream from the deflector, and in the magnetic field of the objective lens, to which a first potential being positive is variably applied, a second electrode being annular, arranged in the magnetic field of the objective lens and between the deflector and the first electrode, to which a second potential being positive and higher than the first potential is applied, and a third electrode being annular, arranged in the magnetic field of the objective lens and to be opposite to the second electrode with respect to the first electrode, to which a third potential lower than the first potential is applied.
    Type: Grant
    Filed: February 13, 2018
    Date of Patent: October 22, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Munehiro Ogasawara
  • Publication number: 20190316274
    Abstract: A vapor phase growth apparatus according to an embodiment includes, n reactors performing a deposition process for a plurality of substrates at the same time, a first main gas supply path distributing a predetermined amount of first process gas including a group-III element to the n reactors at the same time, a second main gas supply path distributing a predetermined amount of second process gas including a group-V element to the n reactors at the same time, a controller controlling a flow rate of the first and second process gas, on the basis of control values of the flow rates of the first and second process gas supplied to the n reactors, and independently controlling predetermined process parameter independently set for each of the n reactors on the basis of control values, rotary drivers, and a heater.
    Type: Application
    Filed: June 26, 2019
    Publication date: October 17, 2019
    Applicant: NuFlare Technology, Inc.
    Inventors: Yuusuke SATO, Hideshi TAKAHASHI, Hideki ITO, Takanori HAYANO
  • Patent number: 10444487
    Abstract: A polarized image acquisition apparatus includes a rotatable diaphragm to restrict a passage region of light passed through an objective lens to two regions mutually opposite across the central axis in 4n equal regions divided rotationally symmetrically in the plane orthogonal to the traveling direction of the light passed through the objective lens, and to change the angle of the passage region so that each two regions of the 4n equal regions become passage regions in order; and a rotating half-wave plate to convert, for each angle of the passage region, a P-polarized component passed through the diaphragm, in the same direction as the angle of the passage region, and an S-polarized component passed through the diaphragm, orthogonal to the angle of the passage region, into polarized waves in orthogonal first and second directions.
    Type: Grant
    Filed: June 1, 2018
    Date of Patent: October 15, 2019
    Assignee: NuFlare Technology, Inc.
    Inventor: Riki Ogawa
  • Patent number: 10445450
    Abstract: In one embodiment, a generating method of drawing data includes generating a pixel map that includes dose amount information on each of pixels obtained by dividing a drawing area on an object into a mesh, extracting, from the pixel map, an island-shaped pixel map which is a group of multiple pixels in which the dose amount information is not zero, determining an order of definition of the dose amount information on the pixels in the island-shaped pixel map, and generating a compressed pixel map including a size of the pixels, information indicating the order of definition, coordinates of a pixel which is first in the order of definition in the island-shaped pixel map, and the dose amount information on the pixels in the island-shaped pixel map, the dose amount information being continuously defined based on the order of definition.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: October 15, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Shigehiro Hara, Kenichi Yasui
  • Publication number: 20190304748
    Abstract: According to one aspect of the present invention, a charged particle beam writing apparatus includes correction figure data generation circuitry configured to generate pattern data of a correction figure pattern for correcting a figure portion detected, where the pattern data includes dose information to identify a dose of the correction figure pattern; correction figure pattern data conversion circuitry configured to convert the pattern data of the correction figure pattern into correction figure pattern pixel data defining a value corresponding to a dose for the each pixel, based on pixel setting common to that of the writing pattern pixel data; and combined-value pixel data generation circuitry configured to generate, for the each pixel, combined-value pixel data by adding the value defined in the writing pattern pixel data and the value defined in the correction figure pattern pixel data.
    Type: Application
    Filed: March 25, 2019
    Publication date: October 3, 2019
    Applicant: NuFlare Technology, Inc.
    Inventors: Ryoichi Yoshikawa, Hideo Inoue
  • Publication number: 20190304749
    Abstract: A multiple charged particle beam writing apparatus includes a defective pattern data generation circuitry configured to generate defective pattern data of a defective pattern having a shape of the defective region in the writing region; a reverse pattern data generation circuitry configured to generate reverse pattern data by reversing the defective pattern data; a combined-value pixel data generation circuitry configured to generate, for the each pixel, combined-value pixel data by adding a value defined in a reverse pattern pixel data and a value defined in a writing pattern pixel data; and a writing mechanism configured to perform multiple writing, using multiple charged particle beams, on the target object such that the each pixel is irradiated with a beam of a dose corresponding to a value defined in the combined-value pixel data.
    Type: Application
    Filed: March 25, 2019
    Publication date: October 3, 2019
    Applicant: NuFlare Technology, Inc.
    Inventors: Ryoichi Yoshikawa, Hideo Inoue
  • Publication number: 20190304737
    Abstract: According to one aspect of the present invention, a charged particle beam irradiation apparatus includes an electromagnetic lens configured to refract the charged particle beam; a plurality of electrodes arranged in a magnetic field of the electromagnetic lens and arranged to surround an outer space of a passage region of the charged particle beam; a supply mechanism configured to supply a gas to the space surrounded by the plurality of electrodes; a potential control circuit configured to control potentials of the plurality of electrodes so that a plasma is generated in the space surrounded by the plurality of electrodes and movements of electrons or positive ions generated by the plasma are controlled; and a stage configured to dispose a substrate irradiated with a charged particle beam passing through the electromagnetic lens, wherein the substrate is irradiated with light radiated by the plasma.
    Type: Application
    Filed: March 18, 2019
    Publication date: October 3, 2019
    Applicant: NUFLARE TECHNOLOGY, INC.
    Inventor: Munehiro Ogasawara
  • Patent number: RE47707
    Abstract: A apparatus according to an embodiment includes a unit to generate first blocks in a writing region in which at least one of writing groups respectively using different base doses is to be written, a unit to generate second blocks for proximity effect correction, in the each of the regions of the groups, a unit to calculate an area density in each of the first blocks, a unit to perform a weighting calculation on the area density for each of the first blocks by using a base dose of a corresponding group, a unit to calculate a dose coefficient for proximity effect correction, for each of the second blocks, by using a corresponding weighted area density, and a unit to calculate a dose by using the base dose of the each of the groups and the dose coefficient of the each of the second blocks.
    Type: Grant
    Filed: October 10, 2016
    Date of Patent: November 5, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Yasuo Kato, Jun Yashima, Akihito Anpo