Abstract: An improved process for preparing 1,3-dialkyl-1,1,3,3-tetraryldisiloxanes and 1,3,5-trialkyl-1,1,3,5,5-pentaaryltrisiloxanes is disclosed. The process utilizes an aryl Grignard reagent to affect displacement of alkoxy, preferably methoxy, groups in the corresponding alkyl-alkoxy substituted di-, and trisiloxanes. Alternatively, partial replacement of the alkoxy groups in an alkyltrialkoxysilane with aryl groups in a Grignard reaction, and subsequent hydrolyis of the remaining alkoxy groups yield the above-noted desired compounds.