Abstract: The invention relates to microelectronics, more particularly, to methods of manufacturing solid-state devices and integrated circuits utilizing microwave plasma enhancement under conditions of electron cyclotron resonance (ECR), as well as to use of plasma treatment technology in manufacturing of different semiconductor structures. Also proposed are semiconductor device and integrated circuit and methods for their manufacturing. Technical result consists in improvement of reproducibility parameters of semiconductor structures and devices processed, enhancement of devices parameters, elimination of possibility of defects formation in different regions, and speeding-up of the treatment process.
Type:
Application
Filed:
November 9, 2009
Publication date:
November 11, 2010
Applicant:
OBSCHESTVO S OGRANICHENNOI OTVETSTVENNOSTJU EPILAB
Inventors:
Sergei Jurievich Shapoval, Vyacheslav Aleksandrovich Tulin, Valery Evgenievich Zemlyakov, Jury Stepanovich Chetverov, Vladimir Leonidovich Gurtovoi
Abstract: The invention relates to microelectronics, more particularly, to methods of manufacturing solid-state devices and integrated circuits utilizing microwave plasma enhancement under conditions of electron cyclotron resonance (ECR), as well as to use of plasma treatment technology in manufacturing of different semiconductor structures. Also proposed are semiconductor device and integrated circuit and methods for their manufacturing. Technical result consists in improvement of reproducibility parameters of semiconductor structures and devices processed, enhancement of devices parameters, elimination of possibility of defects formation in different regions, and speeding-up of the treatment process.
Type:
Application
Filed:
July 28, 2005
Publication date:
December 29, 2005
Applicant:
Obschestvo S Ogranichennoi Otvetstvennostju Epilab
Inventors:
Sergei Shapoval, Vyacheslav Tulin, Valery Zemlyakov, Jury Chetverov, Vladimir Gurtovoi