Abstract: An optical measurement apparatus (100) combining confocal measurement and low-coherence interferometric measurement comprising: a Fourier domain interferometric measurement subsystem (104) comprising a spectrometer (110) operably coupled to a reference arm (136), a measurement arm (138) and a source of electromagnetic radiation (106) via an optical coupler (108), the spectrometer (110) comprising a spectral signal generator (146) responsive to received reflected electromagnetic radiation. A confocal measurement subsystem (102) is also provided comprising an optical scanner (120) having a predetermined scan range for longitudinally scanning, when in use, a beam along a region (128) to be measured.

Abstract: A linear resonance scanning apparatus (100) comprises an electromagnetic drive unit (132) comprising a coil (140) wound about a core (138), the electromagnetic drive unit (132) having a field output end (134). A linear motion bearing assembly (106) is configured to carry a permanent magnet (130), the linear motion bearing assembly (106) having a longitudinal axis of reciprocating motion. A biasing element (122, 126) is disposed adjacent an end of the linear motion bearing assembly (106) to serve as a buffer for motion along the longitudinal axis of reciprocating motion. The permanent magnet (130) has a surface located opposite the field output end (134) of the electromagnetic drive unit (132) in spaced relation to the field output end (134) of the electromagnetic drive unit (132). The permanent magnet (130) is laterally offset with respect to the core (138) so that the core (138) substantially does not overlie the permanent magnet (130) when at rest.

Abstract: A linear resonance scanning apparatus (100) comprises an electromagnetic drive unit (132) comprising a coil (140) wound about a core (138), the electromagnetic drive unit (132) having a field output end (134). A linear motion bearing assembly (106) is configured to carry a permanent magnet (130). the linear motion bearing assembly (106) having a longitudinal axis of reciprocating motion. A biasing element (122, 126) is disposed adjacent an end of the linear motion bearing assembly (106) to serve as a buffer for motion along the longitudinal axis of reciprocating motion. The permanent magnet (130) has a surface located opposite the field output end (134) of the electromagnetic drive unit (132) in spaced relation to the field output end (134) of the electromagnetic drive unit (132). The permanent magnet (130) is laterally offset with respect to the core (138) so that the core (138) substantially does not overlie the permanent magnet (130) when at rest.

Abstract: An optical measurement apparatus (100) combines confocal measurement and low coherence interferometric measurement. The apparatus (100) comprises an interferometric measurement subsystem (102) and a confocal measurement subsystem (104) disposed within a housing (101). An optical combiner (136) is configured to provide the interferometric measurement subsystem (102) and the confocal measurement subsystem (104) with irradiative access to a region to be measured located at a substantially static target location. The interferometric measurement subsystem (102) and the confocal measurement subsystem (104) are respectively configured to image longitudinally in respect of a first subregion (162) and a second subregion (164) in the region to be measured. the second subregion (164) being axially spaced from the first subregion (162). A processing resource (152.

Abstract: An optical measurement apparatus (100) combining confocal measurement and low-coherence interferometric measurement comprising: a Fourier domain interferometric measurement subsystem (104) comprising a spectrometer (110) operably coupled to a reference arm (136), a measurement arm (138) and a source of electromagnetic radiation (106) via an optical coupler (108), the spectrometer (110) comprising a spectral signal generator (146) responsive to received reflected electromagnetic radiation. A confocal measurement subsystem (102) is also provided comprising an optical scanner (120) having a predetermined scan range for longitudinally scanning, when in use, a beam along a region (128) to be measured.

Abstract: An optical measurement apparatus (100) combines confocal measurement and low coherence interferometric measurement. The apparatus (100) comprises a confocal measurement subsystem (102) and an interferometric measurement subsystem (104) disposed within a housing (138). An optical combiner (126) is configured to provide the confocal measurement subsystem (102) and the interferometric measurement subsystem (104) with irradiative access to a region to be measured (134) located at a substantially static target location. An optical path internal to the housing (138) extends from the optical combiner (126) towards the region to be measured (134), and the internal optical path is common to the confocal measurement subsystem (102) and the interferometric measurement subsystem (104). The confocal measurement subsystem (102) and the interferometric measurement subsystem (104) are configured to image longitudinally. and a length of the internal optical path is fixed.

Abstract: An optical measurement apparatus (100) comprises a point source (102) of electromagnetic radiation and an optical path extending from the point source of electromagnetic radiation to a window (122). An optical input arrangement (108) is also provided and comprises a static input lens. An optical output arrangement (114) of the apparatus comprises a static output lens. The apparatus further comprises an intermediate lens (112) and a scanning mechanism (110) configured to carry the intermediate lens (112). A position measurement system is operably coupled to the scanning mechanism (110) and configured to measure a position of the intermediate lens (112). The optical input arrangement (108), the intermediate lens (112) and the optical output arrangement (114) are disposed in the optical path, and the intermediate lens (112) and the scanning mechanism (110) are disposed between the optical input arrangement (108) and the optical output arrangement (114).