Patents Assigned to OEM Group Inc.
  • Dry etch stop process for eliminating electrical shorting in MRAM device structures
    Patent number: 7955870
    Abstract: The present invention relates generally to semiconductor fabrication and particularly to fabricating magnetic tunnel junction devices. In particular, this invention relates to a method for using the dielectric layer in tunnel junctions as an etch stop layer to eliminate electrical shorting that can result from the patterning process.
    Type: Grant
    Filed: September 2, 2009
    Date of Patent: June 7, 2011
    Assignee: OEM Group Inc.
    Inventor: Robert A. Ditizio