Patents Assigned to Oerliken Leybold Vacuum GmbH
  • Coating for gas bearing
    Patent number: 8011880
    Abstract: The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump.
    Type: Grant
    Filed: April 19, 2007
    Date of Patent: September 6, 2011
    Assignee: Oerliken Leybold Vacuum GmbH
    Inventors: Roland Blumenthal, Michael Froitzheim