Abstract: A turbomolecular pump (12) has a circular intake opening (16) distal of an inlet rotor stage (18). The intake opening (16) comprises at least two opening sections (41, 42, 43) that are separated from each other.

Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).

Abstract: Into a vacuum pump device arranged for suctional intake of a process gas (38) possibly comprising reactive particles (40), oxygen in the form of air or pure oxygen is supplied in a controlled manner via an oxygen intake (26, 26a,26b). Thus, controlled oxidation takes place in the compression chamber (24) such that the dust cannot self-ignite in case of sudden ventilation.

Abstract: The resonant frequencies of a rotor supported on magnetic bearings, in particular a rotor of a turbomolecular vacuum pump, are determined. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.

Abstract: In a method for determining a statement of a state of a turbomolecular pump, and in a turbomolecular pump, a vibration curve is determined with a vibration sensor (10) connected to the turbomolecular pump. The determined vibration curve is transferred to an evaluation device (12), wherein vibration amplitudes are detected by a filter (16) in the evaluation device (12) and then compared to comparative values. If a threshold value is exceeded, a warning signal is transferred to a monitoring system (30) by a remote data transfer device (28). The method allows for online monitoring of turbomolecular pumps.

Abstract: A vacuum pump (10) has a vacuum-tight housing (12) and having a gas-tight electrical leadthrough assembly (20) for producing an electrical connection between an electrical component (14,16,18) within the housing (12) and the exterior of the housing. The leadthrough assembly (20) is formed by a housing opening (22), by a sealing compound body (24) seated on the opening, by an electric line in the sealing compound body (24), by a sealing ring (26) between the opening edge of the housing opening (22) and the sealing compound body (24), and by a fixing means (32) for fastening the sealing compound body (24) to the housing (12).

Abstract: The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.

Abstract: A two-shaft vacuum pump has a simplified drive motor. The two-shaft vacuum pump has a synchronous motor as a drive motor which motor rotor is permanently excited. Permanently excited motor rotors are sufficiently small and of light weight such that rotor supporting bearings can be omitted. This also eliminates the problems associated with cooling and lubrication of the supporting bearings.

Abstract: A vacuum pump (10) includes a pump unit (14) and an operating unit (12) arranged spaced from the pump unit (14). The operating unit (12) is connected with the pump unit (14) for controlling it. The pump unit (14) and the operating unit (12) respectively comprise a transceiver module (20,22) for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit (14) and the operating unit (12) are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.

Abstract: The invention relates to a process for the coating of objects made of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys with an oxide ceramic layer formed from the metal which has a thin barrier layer as a boundary layer towards the metal whose surface has been coated with polymers, characterized in that said polymers are introduced into the capillary system of the oxide ceramic layer in the form of dimers or halogenated dimers of general formula I wherein R1 represents one or more hydrogen or halogen residues; each R2 represents hydrogen or halogen; and R3 commonly represent a corresponding xylylene residue for completing a dimeric structure; by vacuum coating, followed by polymerizing the dimers.

Abstract: A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).

Abstract: A piston compressor comprises a piston (12) which oscillates in a cylinder (14). A compressed-gas supply arrangement is provided which comprises a compressed-gas accumulator (34), a compressed-gas supply line (18) between a compressed-gas source (20) and the compressed-gas accumulator (34). Further, the compressed-gas supply line (18) comprises an inlet valve (42) which is open when the piston (12) is in a filling position. The inlet valve (42) is defined by a cylinder wall opening (22) and a piston wall opening (38) which are located opposite each other when the piston (12) is in the filling position, thus defining an open valve, and which are closed by the piston wall (40) and the cylinder wall (24), respectively, when the piston (12) is in the non-filling position, thus defining a closed valve. Thereby, a valve is provided which does not comprise any moving parts and is thus easy to manufacture, is highly reliable and has a long service life.

Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.

Abstract: A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).

Abstract: A screw-type vacuum pump (1) is tempered such that characteristics of the pump are not substantially altered when the pump is subjected to thermal stress. In order to achieve said aim, cooling is adjusted according to an operating state of the screw-type vacuum pump (1), preferably to maintain a substantially constant pump gap (4).

Abstract: A refrigerator (1) has a housing (2, 14, 19), a cylindrical working chamber (15, 21), a cylindrical displacing member (11, 17), a gap (36, 38) which is located between the housing and the displacing member, a regenerator which is disposed inside the displacing member, and a device alternatingly supplying the working chamber with an effective high-pressure gas and an effective low-pressure gas. In order to overcome the disadvantages associated with gas streams occurring in the gap (36, 38), an additional regenerator (gap gas regenerator), (43) is assigned to the gap (36, 38).

Abstract: A pump (1) is provided with a housing (2), having an inlet (28) and an outlet (29), a drive (5), a fixed cylinder (2) centered on a mid-axis (9), a displacer (18), rotating eccentrically within the cylinder (2), a crank drive (13) for the displacer (18), a circumferential sickle-shaped pumping chamber (26) between the cylinder (2) and displacer (18) and a helical sealing element (27, 27?, 27?, 39) in the pumping chamber (26). The pump is a dry vacuum pump, whereby the displacer (18) circulates in the cylinder (2) without making contact.