Patents Assigned to OERLIKON SURFACE SOLULTIONS AG, TRUBBACH
  • Patent number: 9208999
    Abstract: The invention relates to a vacuum treatment chamber, comprising a coil arrangement for generating a magnetic field in the chamber, wherein the coil arrangement comprises at least one first coil section and a second coil section, wherein the first coil section and the second coil section are arranged adjacent to each other in cross-section and preferably in one plane, such that at least a partial section of the first coil substantially follows the course of a partial section of the second coil, wherein the spacing of the first partial section from the second partial section is at least one order of magnitude smaller than the cross-section of the optionally smaller coil section.
    Type: Grant
    Filed: October 5, 2010
    Date of Patent: December 8, 2015
    Assignee: OERLIKON SURFACE SOLULTIONS AG, TRUBBACH
    Inventor: Siegfried Krassnitzer