Patents Assigned to Oerlikon Surface Solutions AG, Präffikon
  • Target age compensation method for performing stable reactive sputtering processes
    Patent number: 9957600
    Abstract: A method for performing reactive sputtering processes while maintaining the sputtering characteristic at the target as well as the deposition rate constant, or at least in an acceptable range for the industrial production context, independent of the target age.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: May 1, 2018
    Assignee: Oerlikon Surface Solutions AG, Präffikon
    Inventors: Denis Kurapov, Siegfried Krassnitzer