Abstract: A lighting device that emits illumination light from two or more angular directions onto a sample surface to be measured, an imaging optical lens, and a monochrome two-dimensional image sensor are provided. This configuration provides a method and an apparatus that take a two-dimensional image of the sample surface to be measured at each measurement wavelength and accurately measure multi-angle and spectral information on each of all pixels in the two-dimensional image in a short time. In particular, a multi-angle spectral imaging measurement method and apparatus that have improved accuracy and usefulness are provided.

Abstract: A lighting device that emits illumination light from two or more angular directions onto a sample surface to be measured, an imaging optical lens, and a monochrome two-dimensional image sensor are provided. This configuration provides a method and an apparatus that take a two-dimensional image of the sample surface to be measured at each measurement wavelength and accurately measure multi-angle and spectral information on each of all pixels in the two-dimensional image in a short time. In particular, a multi-angle spectral imaging measurement method and apparatus that have improved accuracy and usefulness are provided.

Abstract: A lighting device that emits illumination light from two or more angular directions onto a sample surface to be measured, an imaging optical lens, and a monochrome two-dimensional image sensor are provided. This configuration provides a method and an apparatus that take a two-dimensional image of the sample surface to be measured at each measurement wavelength and accurately measure multi-angle and spectral information on each of all pixels in the two-dimensional image in a short time. In particular, a multi-angle spectral imaging measurement method and apparatus that have improved accuracy and usefulness are provided.