Abstract: A laser microscope or a color laser microscope in which a high-resolution image of a sample can be taken without using an acoustic optical element. A rectilinear light beam generating device is used for converting a laser beam into an incoherent rectilinear light beam diverging in a certain direction. Specifically, a laser beam emitted from laser source(s) is converted into an incoherent rectilinear light beam diverging in a certain direction by the rectilinear light beam generating device, and the rectilinear light beam is projected on a sample via a beam deflecting device so as to scan a surface of the sample. The beam reflected from the sample is received by a linear image sensor etc. so as to generate a video signal. As the rectilinear light beam generating device, a micromirror device in which micromirror elements are arranged in a two-dimensional array shape is used.

Abstract: A laser microscope or a color laser microscope in which a high-resolution image of a sample can be taken without using an acoustic optical element. A rectilinear light beam generating device is used for converting a laser beam into an incoherent rectilinear light beam diverging in a certain direction. Specifically, a laser beam emitted from laser source(s) is converted into an incoherent rectilinear light beam diverging in a certain direction by the rectilinear light beam generating device, and the rectilinear light beam is projected on a sample via a beam deflecting device so as to scan a surface of the sample. The beam reflected from the sample is received by a linear image sensor etc. so as to generate a video signal. As the rectilinear light beam generating device, a micromirror device in which micromirror elements are arranged in a two-dimensional array shape is used.

Abstract: A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromirror device comprises a plurality of micromirrors arranged in a two-dimensional array, and each micromirror is vibrated at a high speed by a driving pulse. Since each micromirror is movably supported by a hinge, a mirror layer of the micromirror is displaced in a curved manner by the electrostatic attractive force caused by the driving pulse. By this curved displacement of the mirror layer, each micromirror operates as a cylindrical mirror to convert an incident laser beam into an incoherent light beam which diverges in one direction. The rectilinear beam is projected to a sample through a beam deflection device and an objective lens, and a reflected light from the sample is made incident on a linear image sensor.

Abstract: A laser microscope is provided, which is low in manufacturing costs and compact in structure. A laser beam emitted from a semiconductor laser is converted into a rectilinear light beam which has divergence in one direction by use of a micromirror device. The micromirror device comprises a plurality of micromirrors arranged in a two-dimensional array, and each micromirror is vibrated at a high speed by a driving pulse. Since each micromirror is movably supported by a hinge, a mirror layer of the micromirror is displaced in a curved manner by the electrostatic attractive force caused by the driving pulse. By this curved displacement of the mirror layer, each micromirror operates as a cylindrical mirror to convert an incident laser beam into an incoherent light beam which diverges in one direction. The rectilinear beam is projected to a sample through a beam deflection device and an objective lens, and a reflected light from the sample is made incident on a linear image sensor.