Abstract: A non-contact voltage feeding apparatus for inspecting a circuit pattern on a substrate. The feeding apparatus includes a feed control element having a laminated structure as a light probe. A voltage is applied to the light probe disposed on the feeding side of the circuit pattern to be inspected by irradiating the light probe with a laser beam. An electrostatic capacitance coupling under a non-contact system is provided on the detection side, and an electrical condition of the coupling is extracted from the circuit and a waveform processing is performed on the detected signals so as to make it possible to test respective conductive paths of the circuit pattern.