Patents Assigned to Omicron Nano Technology GmbH
  • Energy filter image generator for electrically charged particles and the use thereof
    Patent number: 7250599
    Abstract: The invention relates to an energy filter image generator for filtering electrically charged particles. The inventive energy filter comprises at least two toroidal energy analysers (30, 40) arranged one inside the other. A transfer lens device (20) is disposed between the plane of emergence (5) of the first energy analyser (30) and the plane of incidence of the second energy analyser (40), thereby making it possible to obtain the perfect energy filtered reproduction of the surface (1?) of a sample on a detector (10).
    Type: Grant
    Filed: November 4, 2003
    Date of Patent: July 31, 2007
    Assignee: Omicron Nano Technology GmbH
    Inventors: Dietmar Funnemann, Matthias Escher