Patents Assigned to Omicron Technology Corporation
  • Method and apparatus for determining the amount of gas adsorbed or desorbed from a solid
    Patent number: 4489593
    Abstract: Methods for determining the amount of a gas adsorbed or desorbed from a solid sample wherein a gas is introduced or withdrawn from a sample containing chamber at a substantially constant mass flow rate while measuring the pressure change within said chamber as a function of time is disclosed. An apparatus for conducting said method which uses a mass flow controller is also disclosed.
    Type: Grant
    Filed: September 9, 1982
    Date of Patent: December 25, 1984
    Assignee: Omicron Technology Corporation
    Inventors: Wim J.M. Pieters, William E. Gates
  • Mass flow controller apparatus
    Patent number: 4487213
    Abstract: An apparatus capable of selecting and controlling the mass flow rate of a gas to be substantially constant over extended periods of time at very low flow rates and very low gas partial pressures is disclosed.
    Type: Grant
    Filed: September 9, 1982
    Date of Patent: December 11, 1984
    Assignee: Omicron Technology Corporation
    Inventors: William E. Gates, Wim J. M. Pieters