Patents Assigned to Ontrak Systems, Incorporated
  • Drip chemical delivery apparatus
    Patent number: 5853522
    Abstract: A drip chemical delivery system used in semiconductor substrate cleaning processes. A drip chemical delivery system which uses small openings in a pipe (holes) and a low air pressure to saturate the brushes in a double sided brush system. This drip delivery system reduces the volumes of chemical solutions used in a scrubbing process and helps to maintain control of the pH profile of a substrate. This system is described and illustrated in the manner it is used in conjunction with a double sided scrubber.
    Type: Grant
    Filed: July 29, 1996
    Date of Patent: December 29, 1998
    Assignee: OnTrak Systems, Incorporated
    Inventors: Wilbur C. Krusell, Lane L. Larson
  • Drip chemical delivery method and apparatus
    Patent number: 5723019
    Abstract: A drip chemical delivery system used in semiconductor substrate cleaning processes. A drip chemical delivery system which uses small openings in a pipe (holes) and a low air pressure to saturate the brushes in a double sided brush system. This drip delivery system reduces the volumes of chemical solutions used in a scrubbing process and helps to maintain control of the pH profile of a substrate. This system is described and illustrated in the manner it is used in conjunction with a double sided scrubber.
    Type: Grant
    Filed: March 18, 1996
    Date of Patent: March 3, 1998
    Assignee: OnTrak Systems, Incorporated
    Inventors: Wilbur C. Krusell, Lane L. Larson
  • Process for brush cleaning
    Patent number: 5693148
    Abstract: A process for brush cleaning used in semiconductor wafer scrubbing systems. A process for brush cleaning that eliminates and/or reduces the load-up of brushes with contaminants. This brush cleaning process changes the pH level of a brush to repel contaminants that are on the brush. This process extends the useful life of the brush without significantly decreasing the throughput of the scrubbing system.
    Type: Grant
    Filed: November 8, 1995
    Date of Patent: December 2, 1997
    Assignee: Ontrak Systems, Incorporated
    Inventors: Mark A. Simmons, Wilbur C. Krusell