Abstract: An imaging apparatus for exposing a pattern onto a substrate has an illumination source that is energizable to generate a polarized exposure illumination beam of an actinic wavelength range and a mask disposed to impart the pattern to the polarized exposure illumination beam. A polarization beam splitter defines an illumination path that conveys the generated polarized exposure illumination beam through a quarter wave plate and plano-convex lens and toward a concave mirror and further conveys a reflected exposure illumination beam from the concave mirror toward an exposure plane for exposing the imparted pattern onto the substrate. The exposure plane is defined by the concave mirror, the plano convex lens, and the polarization beam splitter.

Abstract: An exposure apparatus for use in optical lithography can include a holder and a plurality of UV-LED modules carried by the holder and disposed in an array. A respective plurality of collimating lenses can be disposed in an array corresponding to the array of UV-LED modules. The plurality of UV-LED modules and the respective plurality of collimating lenses can provide a respective plurality of distinct beams of UV light. The plurality of collimating lenses may be spaced from the plurality of UV-LED modules and spaced from the exposure plane and have an optical configuration providing a composite beam of UV light formed from the plurality of distinct beams of UV light in which each beam inside the periphery of the array overlaps each adjacent beam by at least 70% at the exposure plane. A method for directing light onto an exposure plane in an optical lithography procedure is provided.

Abstract: Curemeter and method in which UV exposure is monitored by a portable data collection module and data from the module is processed by a docking station which is located remotely from the site where the UV radiation is present. Temperature is also monitored at the data collection module, and the UV exposure data is compensated for variations in temperature. The data collection module includes shielding and filters to protect the UV detector from the harsh environment in which the UV readings are taken and to limit the radiation impinging upon the detector to the desired spectrum. Programmable thresholds for the detector signals protect against the collection of spurious data.

Abstract: System and method for analyzing pulses from an excimer laser by measuring light energy rather than heat energy. The output of the laser is monitored with a photodetector to provide electrical current pulses corresponding to the intensity of the light in individual ones of the laser pulses. The current pulses are integrated to provide voltages corresponding to the light energy of the laser pulses, and the voltages are converted to digital signals. The digital signals are accumulated during the exposure period to determine the total light energy of the pulses during that period and also during a shorter interval of time during the exposure period. The light energy for the interval is divided by the length of the interval to determine the average intensity of the pulses during the interval. Displays are provided for the light energy and the intensity of the pulses, as well as the length of the exposure period.

Abstract: A transformer unit for supporting, preferably, medical instruments, while furnishing them with particular levels of electric charge to accommodate their operations or recharging. a mounting member supports the transformer, and a series of modular like instrument supports, each having a base that holds an instrument, and an inclined concaved side upon which the instrument rests, are secured together intermediate a pair side walls and connected to the mounting member. Electrical circuitry provides for the conductance of electrical charge to the transformer, and a series of circuitries, one provided in each instrument support, conveys the transformed charge to each support. Secondary circuitry within each support also conducts the stepped-down voltage to each support base where wiring of a medical instrument may be connected to attain its operation, or where a self contained instrument may be recharged as during nonusage.

Abstract: In a bracket for an instrument, a swiveled yoke connects in a ball joint like coupling relationship to an extension that fastens to a support, and is useful for supporting an instrument in the category of a projector, or the like. The swivel socket provided to one end of the extension is separable, with a semicircular shoulder comprising part of an annulus provided in the upper portion of each socket half, and the socket having an extension spaced therebelow, and useful for securing the ball of the yoke therein for universal movement when the socket is assembled.

Abstract: An exposure system is described employing a lamp and means for controlling the exposure time period during which light from the lamp at a preselected level is passed through a light path to an exposure plane. Light is detected in the light path and the brightness of the lamp is adjusted according to the sensed light to provide the preselected level of light output from the lamp during the exposure period. Also described is a method for operating such a system.