Patents Assigned to Optical Metrology Patents Limited
  • Patent number: 7016044
    Abstract: A modulation spectroscopy system (1) directs a probe beam (11) onto a sample (10), the reflected probe beam being collected by a collector (7) and processed by a detector (8). A pump beam generated by a source (4, 5) directs a pump beam (13) onto the sample at the same spot as the probe beam. However, it also switches the pump beam via a path (14) onto an adjacent location not overlapping the probe spot. This is referred to as spatial modulation. A cylindrical lens (16) in the collection subsystem (7) collects reflected light including luminescence from both pump beam spots simultaneously, so that the luminescence becomes a d.c. signal which can be easily eliminated, including means from the modulator for varying pump beam intensities and positions. This provides means to reject the unwanted background luminescence signal as well as improvement to the signal to noise ratio.
    Type: Grant
    Filed: May 25, 2005
    Date of Patent: March 21, 2006
    Assignee: Optical Metrology Patents Limited
    Inventors: Martin Edward Murtagh, Patrick Vincent Kelly