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Patents
Patents Assigned to Optimax Systems, Inc.
Patents Assigned to Optimax Systems, Inc.
Apparatus and process for polishing a substrate
Patent number:
6942554
Abstract:
An apparatus for polishing a substrate with an optical surface. The apparatus contains a polishing pad and and a device for oscillating the polishing pad while simultaneously contacting it with at least 90 percent of said optical surface.
Type:
Grant
Filed:
July 21, 2003
Date of Patent:
September 13, 2005
Assignee:
Optimax Systems, Inc.
Inventor:
Michael P. Mandina