Abstract: A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes. The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality. An improved manifold for a tube-array showerhead, intended for processes with a low pressure differential between the tubes and process chamber, includes holding-stubs to hold each tube by its ends outside the manifold block. At least one holding-stub for each tube is spring-loaded along the direction of the tube's operating axis. Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursor supplies. This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.

Abstract: A power source affected by a geographically propagating condition (e.g. a weather-related condition) is monitored to detect changes in its power output. Characteristics of the monitored changes are analyzed to detect whether the changes are being caused by a geographically-propagating condition that could affect other power sources nearby. The information obtained from the measurements is used to extrapolate impending power-output changes in the same source, in one or more other sources, or in a collection of sources subject to effects of the propagating condition. The extrapolations enable one or more power generating systems associated with the source(s) to maintain the changes in its total power output within operating requirements.

Abstract: Tracking movement of clouds is used to predict the effects of cloud cover on irradiation of a solar-powered distributed power generation system. The predictions enable a solar power plant to maintain the changes in its total power output within operating requirements with less or no dependence on energy storage, back up generation, or load control, use centralized and/or local coordination of solar farm control systems to use storage to its best advantage, alternately reduce power fluctuations without cloud knowledge and use real time solar output prediction capabilities to be able to provide utilities with advance information regarding power fluctuations.

Abstract: A testing apparatus or test jig is configured to accept a electrical device for testing prior to final assembly. In one example, a pair of conductive conveying belts compliantly engage a partially assembled photovoltaic (PV) module by its sides, and electrodes engage orthogonal sides of the module. The test apparatus or jig can be use for a variety of electrical tests, and may, for example be connected to a high potential (HiPot) tester.

Abstract: An aeroelastic solar-power-generating canopy is described that requires minimal construction efforts. The canopy can be formed over supporting structures such as columns, without requiring an existing roof. The canopy contains a plurality of solar panels arranged substantially adjacent to each other, which are coupled to attachment members. Linking members are coupled to the attachment members, the linking members providing a flexing point for the solar panels. A cable is coupled to the linking members, spanning a substantial portion of the distance covered by the solar panels, providing a restraining force. And, at least one of the attachment members and cable is coupled to a supporting structure, wherein the cable in conjunction with the linking members allows the solar panels to dynamically react to loads, the arranged solar panels operating as a covering and as a source of solar power.

Abstract: A group of solar power stations with inverters are adjusted in order to achieve optimum power output in accordance with maximum power-point tracking (MPPT). The MPPT data is used to perform adjustments. Power measurement factors, including Maximum Power Points (MPPs) are established to represent a bus-voltage setting that produces the maximum power output from an individual photovoltaic panel. These settings are established for the group so as to optimize power output under a variety of operating conditions.

Abstract: A tube-array showerhead for CVD or PECVD on large substrates delivers precursors to a process chamber via an array of tubes drilled with precision holes. The tubes rapidly become contaminated with use and must be changed frequently to maintain process quality. An improved manifold for a tube-array showerhead, intended for processes with a low pressure differential between the tubes and process chamber, includes holding-stubs to hold each tube by its ends outside the manifold block. At least one holding-stub for each tube is spring-loaded along the direction of the tube's operating axis. Contaminated tubes can be removed, and clean tubes installed, without disassembling the manifolds or disturbing any high-pressure-differential seals to the ambient atmosphere or precursor supplies. This invention reduces production costs by decreasing chamber down-time and reducing the risk of creating leaks when tubes are changed.

Abstract: A system comprises a processing chamber for maintaining a hydrogen plasma at low pressure. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration.

Abstract: A chemical vapor deposition method includes a step of maintaining a hydrogen plasma at low pressure in a processing chamber. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration.