Patents Assigned to Optoelectronic Systems
  • Patterned thin-film deposition using collimating heated masked assembly
    Patent number: 7115168
    Abstract: Scanning localized evaporation and deposition of an evaporant on a substrate utilizes a mask assembly comprised of a series of mask elements with openings thereon and spaced apart in a stack. The openings are aligned so as to direct the evaporant therethrough onto the substrate. The mask elements are heated and the stack may include a movable shutter element to block openings in adjacent mask elements. The evaporant streams are usually vertical but some may be oblique to the substrate, and they may be of different materials.
    Type: Grant
    Filed: May 3, 2005
    Date of Patent: October 3, 2006
    Assignee: Optoelectronic Systems
    Inventors: Daniel Harrison Grantham, Thomas Samuel Phely-Bobin, Fotios Papadimitrakopoulos, Faquir C. Jain