Abstract: Systems and methods for identifying thermal response of a test structure. An example of the system includes a device that generates a excitation beam, a scanning device that scans the thermal excitation beam over a test structure, and a detector that detects acoustic waves produced scanning by the test structure. The system also includes a display device that generates and displays an image based on the detected acoustic waves. A second detector detects a reflection of the beam off of the test structure and the display device generates and displays an image based on the detected reflection.

Abstract: Methods and systems that excite a test structure with an excitation beam and then sense the response of the test structure after some prescribed time interval with respect to the excitation. One or more detectors detect an emission from the test structure at a location of the test structure that is offset from a position on the test structure that is coincident with the excitation beam as the beam is scanned across the test structure.

Abstract: Methods and system for sensing dynamic failures in an electronic circuit. An exemplary system includes a drive source, a radiant energy source, and a signal comparator. The drive source supplies a dynamic input signal to the electronic circuit, thereby causing the electronic circuit to output a signal. The radiant energy source generates and directs radiant energy at the electronic circuit and thus induces localized changes in the output signal of the electronic circuit. The signal comparator compares the output signal to an expected output signal, thereby producing a comparison signal proportional to the match between the input and output signals. A data processing device generates an image based on the comparison signal and an image based on a reflection signal. A display device displays at least a portion of the generated images simultaneously.

Abstract: Systems and methods for identifying thermal response of a test structure. An example of the system includes a device that generates a excitation beam, a scanning device that scans the thermal excitation beam over a test structure, and a detector that detects acoustic waves produced scanning by the test structure. The system also includes a display device that generates and displays an image based on the detected acoustic waves. A second detector detects a reflection of the beam off of the test structure and the display device generates and displays an image based on the detected reflection.

Abstract: Methods and systems that excite a test structure with an excitation beam and then sense the response of the test structure after some prescribed time interval with respect to the excitation. One or more detectors detect an emission from the test structure at a location of the test structure that is offset from a position on the test structure that is coincident with the excitation beam as the beam is scanned across the test structure.

Abstract: A system and method for indicating real time focus information for a scanning microscope. The system includes a detector, one or more bandpass filters, and one or more power indicators associated with the one or more bandpass filters. The detector detects an electrical signal from the scanning microscope. The bandpass filters filter the detected electrical signal. The bandpass filters are tuned to a desired range of frequencies. The power indicators detect and display average power of the electrical signal filtered by the corresponding bandpass filter. The system also includes a focusing device that generates a focusing signal based on the detected average power and focuses the scanning microscope based on the generated focusing signal. The focusing device automatically focuses the scanning microscope.

Abstract: An optical beam (3) passes through an illuminator (18), a semiconductor device (70), and an imager (20) to form a test object image (17) on a camera (16). Intensity variations in the object image (17) correspond to carrier density and temperature gradients inside the semiconductor device (70).

Abstract: An optical beam (2) passes through a polarizer (10), a target (24), an analyzer (20) and onto a camera (22) where a plurality of images are formed. The images are digitized by a frame grabber (30) and processed by a general purpose computer (32) to form electric field images of the target.

Abstract: A radiant energy point source (10) generates radiant energy, and a mechanism (12, 15, 16) focuses the radiant energy generated by the point source onto a target (18) and scans the target with the focused radiant energy. A collector (16, 14) collects the focused radiant energy that is scattered from the target and a splitter (22) splits the collected radiant energy into two paths. Each of the two paths of the collected radiant energy is focused onto separate focal spots by a focusing mechanism (24). A pair of spatial filters (26, 28) filter the collected radiant energy at the focal spots. The spatial filters are offset from each other along the path of the focused radiant energy. Detectors (30, 32) separately detect the focused radiant energy which passes through each of the spatial filters and produce signals proportional to the quantity of detected focused radiant energy present.