Abstract: A vertical comb-drive actuator comprising a support base and a movable body is described. The support base comprises first comb electrodes and a first surface wherein the first comb electrodes extend from the first surface. The movable body attached to the support base comprises second comb electrodes and a second surface wherein the second comb electrodes extend from the second surface. The movable body may rotate about a rotation axis and the first comb electrodes are interdigitated with the second comb electrodes correspondingly. The second comb electrodes extend along a first direction, the rotation axis extends along a second direction, and the first comb electrodes extend along a third direction. The distance between the first lateral face of the first comb electrode and the second surface is shorter than the second length defined as the distance between the end surface of the second comb electrode and the second surface.

Abstract: A laser projector includes a laser source module for generating an input light beam, a deflection component that deflects the input light beam to mutually orthogonal first and second scanning directions to form a scanning light beam, a first prism and a second prism both used for allowing the scanning light beam to pass therethrough for performing two-dimensional scanning on an imaging surface and formation of an image. By adjustment of the angle between the first prism and the second prism, various conditions are satisfied to achieve image distortion correction and image lift.

Abstract: An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator.

Abstract: A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.

Abstract: An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator.

Abstract: A micro-electro-mechanical actuator consists of a first semiconductor layer comprising a movable element with comb electrodes, a support element with inner and outer comb electrodes and a stationary element with comb electrodes, an electrical insulation layer, and a second semiconductor layer with a cavity to allow out-of-plane rotation of the movable and support elements. The movable element is mounted to the support element by a first pair of torsional hinges whereas the support element is mounted to the stationary element by a second pair of torsional hinges such that the actuator is in gimbaled structure. Inner comb electrodes of the support element interdigitate with comb electrodes of the movable element, and outer comb electrodes of the support element interdigitate with comb electrodes of the stationary element in the same plane defined by the first semiconductor layer to form in-plane comb-drive actuators.

Abstract: A two-dimensional comb-drive actuator and manufacturing method thereof are described. The two-dimensional comb-drive actuator includes a supporting base, a frame and a movable body. The supporting base has first comb electrodes and the frame has internal comb electrodes and external comb electrodes. The external comb electrodes of the frame are interdigitated to the first comb electrodes of the supporting base. The movable body has second comb electrodes which are interdigitated to the internal comb electrodes of the frame. The thicknesses of the second comb electrodes of the movable body are unequal to the internal comb electrodes of the frame and the external comb electrodes of the frame are unequal to the first comb electrodes of the supporting base. The two-dimensional comb-drive actuator utilizes a conducting layer for the above-mentioned comb electrodes in order to increase the rotation angle and operation frequency thereof.

Abstract: A head-up display system is described. The head-up display system includes an image projection device, a diffusion unit, and a frame demonstration medium. The image projection device emits the visible light, containing text or image information, for generating a real image on the diffusion unit. The frame demonstration medium receives the visible light reflected from the diffusion unit. By adjusting the received visible light reflected from the diffusion unit, the frame demonstration medium generates a virtual image corresponding to the real image. The distance between the real image corresponding to the diffusion unit and the frame demonstration medium is preferably equal to the distance between the virtual image and the frame demonstration medium. Alternatively, the visible light is projected to the frame demonstration medium and then reflected to the diffusion unit.

Abstract: A laser pointer includes a human-machine interface disposed above the housing for users to control components inside the housing to decide patterns and size of the projecting image. The components consist of a frequency/phase control module, a driving energy control module, a laser beam generating module and a light scanning device. The frequency/phase control module controls the driving energy control module while the driving energy control module controls driving energy of the light scanning device. The size of the image is controlled by change of the amplitude of the light scanning device while the amplitude is changed along with the driving energy. The amplitude may also change along with the driving frequency. When the driving energy is fixed and the driving frequency is close to the resonant frequency, the amplitude increases. On the contrary, the amplitude decreases.

Abstract: A scanning projection apparatus for displaying image comprises a light source for generating a light beam, a beam scanner which deflects the light beam to project a two dimensional image field, a modulation means for modulating the intensity of the light beam, and a sensor to detect the scanned light beam. The light source may consist of a plurality of semiconductor lasers and/or solid state lasers to generate light beams with wavelengths of red, green and blue colors aligned into a single light path. The image field is divided into an active image field for displaying image and a dark field in the perimeter of the image field wherein the light beam is switched off to reduce inherent image defects.

Abstract: A control method of stabilizing the oscillation amplitude of a torsion oscillator is described. The method includes the steps of: driving a torsion oscillator at a predetermined frequency with a drive energy level by a control module to generate a scanning angle of the incident light beam, wherein the drive energy level is associated with the predetermined frequency; comparing the scanning angle corresponding to the drive energy level with a designate scanning angle by the control module; and adjusting the drive energy level based on the comparison result until the scanning angle of the torsion oscillator is equal to the designate scanning angle.

Abstract: A head-up display system is described. The head-up display system includes an image projection device, a diffusion unit, and a frame demonstration medium. The image projection device emits the visible light, containing text or image information, for generating a real image on the diffusion unit. The frame demonstration medium receives the visible light reflected from the diffusion unit. By adjusting the received visible light reflected from the diffusion unit, the frame demonstration medium generates a virtual image corresponding to the real image. The distance between the real image corresponding to the diffusion unit and the frame demonstration medium is preferably equal to the distance between the virtual image and the frame demonstration medium. Alternatively, the visible light is projected to the frame demonstration medium and then reflected to the diffusion unit.

Abstract: A control method of stabilizing the oscillation amplitude of a torsion oscillator is described. The method includes the steps of: driving a torsion oscillator at a predetermined frequency with a drive energy level by a control module to generate a scanning angle of the incident light beam, wherein the drive energy level is associated with the predetermined frequency; comparing the scanning angle corresponding to the drive energy level with a designate scanning angle by the control module; and adjusting the drive energy level based on the comparison result until the scanning angle of the torsion oscillator is equal to the designate scanning angle.

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.