Abstract: A dynamic beam splitter including a beam deflector having a plurality of operative regions, the beam deflector being operative to receive a laser beam at a first one of the plurality of operative regions, the laser beam passing through the beam deflector, and to selectably direct the laser beam in response to a control input signal to pass through the beam deflector a second time. Methods for splitting a beam and for manufacturing an electrical circuit employing the dynamic beam splitter are also enclosed.
Type:
Grant
Filed:
December 23, 2003
Date of Patent:
April 17, 2007
Assignee:
Orbtech Ltd.
Inventors:
Abraham Gross, Zvi Kotler, Eliezer Lipman, Dan Alon