Abstract: A specific monocarboxylic acid with even-numbered carbon atoms, sebacic acid, or a salt thereof is used as a corrosion inhibitor. Alternatively, a specific aliphatic monocarboxylic acid, sebacic acid, or a salt thereof is blended with a specific aliphatic oxycarboxylic acid, a specific polycarboxylic acid, or a salt thereof to prepare a corrosion inhibitor. These corrosion inhibitors can be used in a cooling water system using low-hardness water and in water systems wherein a water flow velocity above a given level cannot always be secured, whereby a high corrosion control performance can be exhibited without imposing unfriendly loads on the environment.

Abstract: A heat exchange cooling system for cooling an object of heat exchange such as machinery, air, or liquid is provided. The system includes a heat exchanger, a cooling water supply device, cooling water circulation piping, a flow rate adjustment valve, a cooling water supply system, and a controller for controlling the flow rate of cooling water. The system includes separate loops for the circulation piping and the cooling supply system. The separate loops are coupled to one another at an inlet and an outlet of the system.

Abstract: The electrodeionization water producing apparatus comprising a depletion chamber packed with an ion exchange material, the depletion chamber being partitioned by a cation exchange membrane on one side and an anion exchange membrane on the other side, and concentrate chambers installed on both sides of the depletion chamber with the cation exchange membrane and the anion exchange membrane disposed inbetween, the depletion chamber and the concentrate chambers disposing between an anode chamber equipped with an anode and a cathode chamber equipped with a cathode, wherein the concentrate chambers are packed with an organic porous ion exchange material having a continuous pore structure in which the wall made from interconnected macropores contains mesopores with an average diameter of 1 to 1,000 &mgr;m. The apparatus ensures reduction of electric resistance and does not form scale in the concentrate chamber during long continuous operation.

Abstract: An electric conductometer comprising at least two electric conductivity measuring electrodes each body of which is made from a conductive metal and each surface of which is formed by a titanium oxide layer as an electrode surface, a space for storing a substance to be measured formed between the electrode surfaces of the electrodes, and means for irradiating light to the electrode surfaces. Since the electrode surfaces are formed from the titanium oxide layers, organic substances contained in a measuring system are decomposed and prevented automatically from adhering or being adsorbed to the electrode surfaces. Consequently, electric conductivity can be measured stably and accurately at all times without substantially requiring any cleaning.

Abstract: An organic porous material having a continuous pore structure, which comprises interconnected macropores and mesopores with a radius of 0.01 to 100 &mgr;m in the walls of the macropores, having a total pore volume of 1 to 50 ml/g and having pore distribution curve characteristics wherein the value obtained by dividing the half-width of the pore distribution curve at the main peak by the radius at the main peak is 0.5 or less. The organic porous material is useful as an adsorbent having high physical strength and excelling in adsorption amount and adsorption speed, an ion exchanger excelling in durability against swelling and shrinkage, and a filler for chromatography exhibiting high separation capability.

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is adsorbed at an adsorbing device (18) and then desorbed using nitrogen as a purge gas. A desorbed gas with CF4 and NF3 concentrated can be obtained in this manner. The desorbed gas is then supplied to a chromatographic separator (20) for chromatographic separation with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the adsorbing device (18), chromatographic separation of the gas constituents can be efficiently performed. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A discharge gas containing PFC gas including CF4 and NF3 generated from a manufacturing process (10) is concentrated at a concentrator (18) and then chromatographically separated at a chromatographic separator (20) with nitrogen as a carrier gas. In this manner, CF4 and NF3 within the PFC gas can be separated. In particular, because the gas is once concentrated at the concentrator (18), chromatographic separation can be efficiently achieved. By independently concentrating CF4 and NF3 obtained by the chromatographic separation, high purity gas constituents of the PFC gas can be obtained, and reused at the manufacturing process (10).

Abstract: A carrier (A) of thermoplastic polymer is mixed and contacted with photocatalytic particles (B) preferably in a rotary heating drum to fusion-bond the particles (B) to surface portions of the carrier (A) in such a manner that multiple particles (B) are stacked in directions perpendicular to the surfaces of the carrier (A), whereby a photocatalyst-bearing material can be produced, which is capable of exhibiting a high photocatalysis for a long period of time. When water is the object of treatment, the specific gravity of the photocatalyst-bearing material is preferably 0.7 to 1.3, especially preferably 0.9 to 1.1.

Abstract: By passing an alkali regenerating agent A through a basic anion exchange resin (3), and through a strongly acidic cation exchange resin (4), the basic anion exchange resin can be regenerated while amphoteric organic materials such as the amino acids captured at the strongly acidic cation exchange resin can be desorbed. Then, an acid regenerating agent B is passed through the strongly acidic cation exchange resin to regenerate the strongly acidic cation exchange resin.

Abstract: Deionized water from a deionized water source (21) for electrolysis is supplied by a pressurizing pump (20) to an electrolyzer (2) to obtain a hydrogen gas and ozone gas by means of electrolysis. The pressures of these gasses are maintained at not less than the atmospheric pressure. These gasses at a pressure of the atmospheric pressure or more are dissolved in high-purity water in gas dissolving units (6,7) to obtain ozone water and hydrogen water respectively. These ozone water and hydrogen water are introduced into mixer (8,9) to adjust pH respectively. In this way, highly-concentrated, gas dissolved cleaning solution is prepared in a short period of time.

Abstract: A chromatographic separator allows a feed liquid material consisting of two or more than two components and a liquid eluent to circulate within an endless circular path 16, wherein columns 14 are coupled to one another, to separate the feed liquid material into two components. The selector valves 23 and 33 are switched to allow pumps 20 and 30 to serve to circulate the fluid through the circular path 16 and to inject each liquid from the tanks 25 and 35. Furthermore, an ordinary ON/OFF valve is used as discharge valves 41 and 51 for each of the liquids and thus the pressure specification required for the circular path 16 is reduced.

Abstract: A wet cleaning apparatus can remove trace heavy metals, colloidal matter or other impurities contained in ultra-pure water to be used as rinse water in semiconductor cleaning processes and suppress deposit of trace impurities such as heavy metals or other particles that would otherwise cause characteristics of such devices to deteriorate. A wet cleaning apparatus for rinsing with ultra-pure water as a rinse liquid by supplying ultra-pure water through a piping to a rinse location inside the apparatus. The rinse location is a point of use of the ultra-pure water. The wet cleaning apparatus includes a module filled with porous film in which polymer chains having at least one of an anion exchange group, a cation exchange group, and a chelating group are held in the middle of the piping positioned inside the apparatus. The wet cleaning apparatus further includes a means for adding hydrogen gas to the rinse liquid.

Abstract: A tetraalkylammonium hydroxide (TAAH) solution recovered from a development waste through separation therefrom of impurities such as photoresist is mixed with a surface-active substance to have the surface tension thereof adjusted to a desired one, and then reused as a rejuvenated developer. Thus, the surface-active effect (wetting properties) of the rejuvenated developer recovered from the development waste is properly adjusted and controlled, whereby fine photoresist patterns can be stably and effectively developed. Usable surface-active substances include surfactants, and dissolved photoresist contained in the development waste or a photoresist-containing solution such as a photoresist-containing treated solution derived therefrom.

Abstract: The rotary member (12) of the rotary valve (10) includes columns (separation vessels) (14) coupled to each other to form an endless circular path (16) and rotates to separate components A and C from a feed liquid material containing two or more components. A concentration sensor (17) is connected to a tube (141) that connects between columns (14) and is mounted on the rotary member (12) rotatably in unison with the columns (14) to detect the concentration of the component A flowing in the circular path (16). Based on the detected result of the concentration sensor (17), fine tuning of the timing of start and the time length of each step can be effected, thereby providing an improved separation performance for the chromatographic separator.

Abstract: A raw gas containing a gas component A with low affinity with an adsorbent and a gas component C with high affinity with the adsorbent are sequentially supplied to at least three adsorption columns, while a desorption gas containing a gas component D which differs from the gas components A and C is supplied to each of the adsorption columns other than the one to which the raw gas is being supplied. When the raw gas is supplied to the adsorption columns, the gas component A having lower affinity with the adsorbent exits the adsorption columns earlier than the gas component C having higher affinity. The gas components A and C can thus be separated from each other. When a gas including an enriched gas component A is discharged from the outlet of each adsorption column, the full amount is extracted out of the system. When a gas including an enriched gas component C is discharged from the outlet of each adsorption column, the full amount is extracted out of the system.

Abstract: A cation exchange membrane (11) and an anion exchange membrane (12) are alternately arranged between an anode (20) and a cathode (19). A desalination chamber (14) and a concentrating chamber (15) are alternately formed between both the exchange membranes (11), (12). Then, the desalination chamber (14) is formed to hold a channel through which liquid flows from one to the other side of the desalination chamber, and allow the cation exchange membrane (11) to contact the anion exchange membrane (12). There is thus obtained an electrodeionization water producing apparatus which maintains a deionizing efficiency as in a conventional case, has a simple structure, is easy to manufacture, and has a high degree of freedom of apparatus configuration.

Abstract: A coagulator for receiving water bearing suspended solids and a coagulant and for coagulating the suspended solids includes a coagulation and sedimentation part and an upstream coagulation part. The coagulation and sedimentation part includes a second packing medium accumulation layer with accumulated packing media having a void volume, and a sludge accumulation zone positioned below the second packing medium accumulation layer and configured to receive solids that coagulate from the water and also having a sludge removal opening by which the received coagulated solids may be discharged. The water bearing the coagulant is allowed to flow upward through the second packing medium accumulation layer to coagulate and settle the suspended solids from the water in the sludge accumulation zone.

Abstract: In chromatographic separation in a plurality of steps with a chromatographic separator packed with an ion exchanger used as at least part of chromatographic packing, at least part of the ionic form of at least part of the ion exchanger is changed to an ionic form fit for separation of components to be separated in each step to effect chromatographic separation, whereby a starting fluid material containing at least 3 components can be efficiently separated into at least 3 fractions. A preferred example of the chromatographic separator comprising a group of packing bed units linked in endless series to form a circulation flow path is provided with a shutoff valve at a position of the circulation flow path; starting fluid material feed means, desorbent feed means and 2-fraction withdrawal means for all the packing bed units; and a single-fraction withdrawal means connected to the circulation flow path on the upstream side of the shutoff valve and without any packing bed unit therebetween.

Abstract: By passing an alkali regenerating agent A through a basic anion exchange resin (3), and through a strongly acidic cation exchange resin (4), the basic anion exchange resin can be regenerated while amphoteric organic materials such as the amino acids captured at the strongly acidic cation exchange resin can be desorbed. Then, an acid regenerating agent B is passed through the strongly acidic cation exchange resin to regenerate the strongly acidic cation exchange resin.

Abstract: Heat exchange water for cooling an object of heat exchange such as machinery, air, or liquid, which serves to prevent oxidation and deterioration of metal materials used in pipes for supplying/circulating the heat exchange water or in the liquid ends of the heat exchanger, to suppress growth of algae and microorganisms, and to reduce influence on the environment. The heat exchange water is reductive water having zero or negative standard oxidation-reduction potential as determined on the basis of the hydrogen electrode standard.