Patents Assigned to Orsay-Physics, S.A.
  • Patent number: 7045791
    Abstract: The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.
    Type: Grant
    Filed: March 19, 2001
    Date of Patent: May 16, 2006
    Assignees: Credence Systems Corporation, Orsay-Physics, S.A.
    Inventors: Gérard Benas-Sayag, Patrick Bouchet, Antoine Corbin, Pierre Sudraud