Abstract: In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied. IA/IB ? 3.5 (1) (“IA” represents a spectrum value standardized at 3,500 cm-1, and “IB” represents a spectrum value standardized at 1,100 cm-1).

Abstract: An optical modulator that suppresses poor welding between a case main body and a lid portion is provided.

Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.

Abstract: An optical modulator with which electrical connection between a signal electrode and signal wiring of a wiring substrate can be reliably made even in a case where a width of the signal electrode in an action portion of an optical control substrate is narrow is provided.

Abstract: An anti-fouling coating film of the present invention includes a component (A): zirconium; a component (B): lanthanum; and a component (C): at least one selected from the group consisting of silicon, phosphorus, and boron, in which in a case where masses of the component (A), the component (B), and the component (C) are used by being converted into masses of oxides thereof, total mass of the component (A) and the component (B) with respect to a mass of the anti-fouling coating film is 90% or more and 95% or less, and in a case where X is defined by X=mass of component (B)/(total mass of component (A)+component (B))×100, X is 20% or more and 50% or less, and the mass of the component (C) to the mass of the anti-fouling coating film is 5% or more and [6+(X?20)/6]% or less.

Abstract: A method for repairing an electrostatic chuck device that is formed by bonding an electrostatic chuck member made of ceramics and a temperature-controlling base member made of metal with a first adhesive layer sandwiched therebetween is provided. The method includes a step of repairing the first adhesive layer that has been eroded by using a cold-curing adhesive.

Abstract: A composite sintered body, wherein the composite sintered body consists of ceramic composite sintered body, the ceramic composite sintered body comprises aluminum oxide as a main phase, and silicon carbide as a sub-phase, in which the composite sintered body has mullite in crystal grains of the aluminum oxide.

Abstract: It is possible to provide an optical modulator in which a transmission loss from a driver circuit element to a modulation substrate is reduced. An optical modulator includes a modulation substrate (1) that includes an optical waveguide (200) and a modulation electrode (10) for modulating a light wave propagating through the optical waveguide, a driver circuit element (2) that generates a modulation signal to be applied to the modulation electrode (10), and a case (3) that accommodates the modulation substrate (1) and the driver circuit element (2), in which an output terminal (20?) that outputs the modulation signal is provided on an upper surface side of the driver circuit element (2), and a wiring substrate (4) including a wiring that electrically connects the output terminal (20?) and the modulation electrode (10) is disposed above the driver circuit element (2) and the modulation substrate (1) to straddle both the driver circuit element (2) and the modulation substrate (1).

Abstract: An optical waveguide element that suppresses insertion loss related to coupling to an optical fiber or the like while miniaturizing the optical waveguide element is provided. There is provided an optical waveguide element including: a rib optical waveguide (10) that is made of a material (1) having an electro-optic effect; and the reinforcing substrate (2) that supports the optical waveguide, in which one end of the optical waveguide forms a tapered portion (11) of which a width narrows toward an end surface of the reinforcing substrate, a structure (3) made of a material having a higher refractive index than a material constituting the reinforcing substrate is provided so as to cover the tapered portion, and a coating layer (4) made of a material having a lower refractive index than the material constituting the structure is disposed so as to cover the structure.

Abstract: An optical device includes a housing that accommodates at least an optical waveguide element, a main body portion 1 of the housing having an opening portion OP on one surface and a lead pin PN1 fixed to a side surface adjacent to the one surface, and including a metal member 2 disposed to surround the opening portion OP and a lid member 11 that closes the opening portion OP and is joined to the metal member 2, in which end portions of the metal member 2 and the lid member 11 along the side surface of the main body portion 1 at which the lead pin PN1 is disposed are located on an inner side of the main body portion 1 than the side surface of the main body portion 1.

Abstract: To provide an optical waveguide device that is small, has low optical loss, and has long-term stability. Provided is an optical waveguide device in which an optical waveguide A (20) is formed on a first substrate (2), an end portion of the first substrate has an input portion that inputs a light wave into the optical waveguide A or an output portion that outputs a light wave from the optical waveguide A, an optical waveguide B (10) is formed on a second substrate (1), the second substrate has an optical modulation portion that modulates a light wave propagating through the optical waveguide B, and at least a part of the optical waveguide A (20) has a conversion portion (20) that converts an optical mode field diameter.

Abstract: Provided is an electrostatic chuck device including: an electrostatic chuck plate which has a dielectric substrate having a placement surface on which a wafer is placed and electrodes positioned in the dielectric substrate; a focus ring which is installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface; and a power connection portion which connects the electrode and a power supply. The electrostatic chuck plate has a first electrode positioned in a region overlapping the placement surface in plan view and a second electrode positioned in a region overlapping the focus ring in plan view. The power connection portion includes a power wire electrically connecting the first electrode and the second electrode via a current regulator.

Abstract: Surface-modified zinc oxide particles having a silane coupling agent having an alkoxy group on surfaces thereof, in which the surface-modified zinc oxide particles have 5.0 × 10-2 g2/s or more and 1.0 × 102 g2/s or less of a penetration rate coefficient A of cyclopentasiloxane with respect to the surface-modified zinc oxide particles, which is indicated by A in the following formula (1). W2 = A·t (1) (in the formula, W is a penetration weight (unit: g), and t is a time (unit: s).

Abstract: A wafer support device includes a dielectric substrate and an RF electrode provided in the dielectric substrate. The RF electrode is divided into a plurality of zone electrodes arranged in a planar direction of the dielectric substrate. The wafer support device has: a short-circuit member interconnecting the plurality of zone electrodes; and a main power supply rod connected to the short-circuit member from a back side of the dielectric substrate.

Abstract: Provided is an optical waveguide device in which both signal electrode collapse and signal electrode peeling/damage can be prevented.

Abstract: Surface-modified zinc oxide particles which have a silane coupling agent having an alkoxy group on surfaces thereof, in which d50 when measured with a laser diffraction/scattering type particle size distribution-measuring instrument by the following measurement method is 4 ?m or less. (Measurement method) 10 g of the surface-modified zinc oxide particles, 88 g of cyclopentasiloxane, and 2 g of polyglyceryl-3 polydimethylsiloxyethyl dimethicone are mixed to obtain a liquid mixture, a dispersion treatment is performed on the obtained liquid mixture at 9,500 rpm for 5 minutes using a homogenizer to obtain a liquid dispersion, the liquid dispersion is diluted with cyclopentasiloxane so that a content of the surface-modified zinc oxide particles in the obtained liquid dispersion is 0.01% by mass to produce a measurement solution, and d50 is measured with the laser diffraction/scattering type particle size distribution-measuring instrument using the obtained measurement solution.

Abstract: An electrostatic chuck device includes: an electrostatic chuck plate having a dielectric substrate having a placement surface on which a wafer is placed and an adsorption electrode positioned in the dielectric substrate; a metal base supporting the electrostatic chuck plate from a back surface side opposite to the placement surface; and a focus ring installed on an outer peripheral portion of the electrostatic chuck plate and surrounding the placement surface. The electrostatic chuck plate has a ring adsorption region which is adsorbed to the focus ring and is located on a surface positioned on the same side as the placement surface and has a base adsorption region which is adsorbed to the metal base and located on a back surface opposite to the placement surface.

Abstract: Provided is a dispersion liquid for sealing a light-emitting element containing metal oxide particles having a refractive index of 1.7 or higher and a surface-modifying material at least partially attached to the metal oxide particles, in which a particle diameter D50 of the metal oxide particles when a cumulative percentage of a scattering intensity distribution obtained by a dynamic light scattering method is 50% is 30 nm or more and 100 nm or less, and a content of the surface-modifying material not attached to the metal oxide particles is 60% by mass or less with respect to a total content of the metal oxide particles and the surface-modifying material.

Abstract: An optical modulator includes: an optical waveguide element including an optical waveguide formed on a substrate and a signal electrode for controlling a light wave propagating through the optical waveguide; a drive circuit for outputting two high-frequency signals; and two terminating resistors for respectively terminating outputs of the two high-frequency signals from the drive circuit. The output of one of the high-frequency signals of the drive circuit propagates through the signal electrode of the optical waveguide element and is terminated by a first terminating resistor which is one of the terminating resistors. The output of the other of the high-frequency signals of the drive circuit is terminated by a second terminating resistor which is the other of the terminating resistors. A resistance value of the second terminating resistor is greater than a resistance value of the first terminating resistor.

Abstract: An object of the present invention is to reduce non-uniformity of etching in a plane of a wafer. An electrostatic chuck device includes: an electrostatic chuck part having a sample mounting surface on which a sample is mounted and having a first electrode for electrostatic attraction; a cooling base part placed on a side opposite to the sample mounting surface with respect to the electrostatic chuck part to cool the electrostatic chuck part; and an adhesive layer that bonds the electrostatic chuck part and the cooling base part together, in which the cooling base part has a function of a second electrode that is an RF electrode, a third electrode for RF electrode or LC adjustment is provided between the electrostatic chuck part and the cooling base part, and the third electrode is bonded to the electrostatic chuck part and the cooling base part and insulated from the cooling base part.