Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.

Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.

Abstract: Provided is a radial direction controller capable of handling changes in negative bearing stiffness according to the mounting orientation.

Abstract: Provided is a radial direction controller capable of handling changes in negative bearing stiffness according to the mounting orientation.

Abstract: In a grease filled bearing for a machine such as a turbo molecular pump that rotates at high speed, objects are to prevent grease retained in an inner circumferential part of a ball retainer from being forced out to the outside of the bearing due to centrifugal force, thereby achieving extension of the operational life of the bearing, and preventing occurrence of rotational mass unbalance due to the grease forced out. A retainer (1) of a ball bearing includes a main body (1A) having a circular annular shape, and plural circular pockets (1a) for retaining balls (4) therein that extend through the main body (1A) in a radial direction, wherein intermediate parts between adjacent pockets (1a) in an inner circumferential surface of the main body (1A) define recesses (1b) for holding grease.

Abstract: An object is to provide a turbomolecular pump with rotor and stator blades alternatively arranged that can prevent collision between the adjacent rotor and stator blades due to air inrush, which may take place due to vacuum break in a system operation, prevent excessive centrifugal force to a hub portion of a rotor, and further enhance pumping performance. A blade cross sectional profile taken along the circumferential direction of each of the rotor blades of a rotor blade stage has an upstream portion curved convexly backward in a rotational direction of the rotor and a downstream portion curved convexly forward in the rotational direction of the rotor, thereby forming the blade cross sectional profile into an S-shape or inversed S-shape.

Abstract: A pump device and a pump unit of the pump device. The pump device includes a low-temperature flat plate group (low-temperature portion) having a plurality of flat plates as low-temperature objects arranged parallel with each other at specified intervals in a direction crossing a flow passage for a gas; a high-temperature flat plate group (high-temperature portion) having a plurality of flat plates as high-temperature objects arranged parallel with each other at specified intervals in a direction crossing the flow passage; and, a temperature-operating device operating the temperature of at least one of these flat plate groups so that a temperature difference occurs between these flat plate groups. The flat plates are displaced from each other in the flow direction of the flow passage, and a heat insulating layer is interposed between the low-temperature flat plates and the high-temperature flat plates.

Abstract: A sputtering method is for forming, in a vacuum chamber, an initial layer on a film formation target object and then further forming a second layer on the initial layer therein, and the method includes: in the vacuum chamber, arranging surfaces of a pair of targets to face each other while distanced apart from each other at a preset distance and to be inclined toward the film formation target object placed at a lateral position between the targets, and then sputtering the targets by generating a magnetic field space on the facing surfaces of the pair of targets, and thus forming the initial layer on the film formation target object by using particles sputtered by the sputtering; and further forming the second layer on the film formation target object at a higher film forming rate than a film forming rate of the initial layer.

Abstract: A pump apparatus comprises a low-temperature flat plate group (a low-temperature portion) C having flat plates 5 as a plurality of low-temperature bodies arranged parallel with each other with intervals in a direction crossing a passage 4 of gas, a high-temperature flat plate group (a high-temperature portion) H having flat plates 6 as a plurality of high-temperature bodies arranged parallel with each other with intervals in the direction crossing the passage 4, and temperature operation means for operating at least one of temperatures of the flat plate groups to generate temperature difference between the flat plate groups. The flat plates 5 and the flat plates 6 are displaced from each other in a flow direction in the passage 4, and a heat insulating layer interposed between the flat plates 5 and the flat plates 6.

Abstract: A thread groove type vacuum pump in which the gap between a rotor and a stator is not subjected to any influence of the rotor temperature and thus the pumping performance does not deteriorate during plasma combustion in a nuclear fusion reactor. The thread groove pumping portion is formed as a circular cone so that the expansion and contraction of the rotor occurs along the generatrix of the circular cone. The pump exhibits supreme pumping performance throughout the whole running mode of the vacuum pumping system of the nuclear fusion reactor because the gap between the rotor and the stator is kept constant despite changes of thermal expansion due to the temperature change of the rotor caused by the different gas loads.

Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk are cut in annular recesses to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.

Abstract: A vacuum pump includes a casing provided with an inlet port and an outlet port; a turbo molecular pump unit disposed in an uppermost section, with respect to a flow direction of the gas, of the casing; a peripheral groove vacuum pump unit disposed in a middle section of the casing; and a vortex vacuum pump unit disposed in a lowermost section, with respect to the flow direction of the gas, of the casing.

Abstract: A vacuum pump includes a casing provided with an inlet port and an outlet port, a peripheral groove vacuum pump unit disposed in an upper section, with respect to a flow direction of the gas, of the casing, and a vortex vacuum pump unit disposed in a lower section, with respect to the flow direction of the gas, of the casing. The vacuum pump unit and the vortex vacuum pump unit have a common rotor. Since the common rotor is provided for the vacuum pump unit and the vortex vacuum pump unit, the dynamic balance of the rotor can be easily adjusted and the rotor rotates with a minimal amount of vibration.

Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.

Abstract: Disclosed is a vacuum pump having a peripheral groove vacuum pump unit which includes a casing provided with an inlet port and an outlet port; a rotor disposed within the casing and including a rotor shaft journaled on the casing, a rotor body fixed to the rotor shaft and provided integrally with a rotor disk; and a stator fixedly disposed within the casing and provided with an annular groove receiving the peripheral portion of the rotor disk. Both sides of the peripheral portion of the rotor disk are cut in steps or portions of the side walls of the annular groove corresponding to the peripheral portion of the rotor disk are cut in annular recesses to form flow passages on both sides of the peripheral portion of the rotor disk. Partitions are projected from the stator into the flow passages. The starting ends of the flow passages on the inlet side of the partitions communicate with the inlet port, and the terminating ends of the same on the outlet side of the partitions communicate with the outlet port.

Abstract: A hollow cylindrical stator and a cylindrical rotor are disposed in the stator with a gap therebetween, the inner peripheral surface of the stator or the outer peripheral surface of the rotor being provided with a helical groove, or thread groove, and evacuation being performed by rotation of the rotor. The width of the helical groove adjacent the suction side of the pump is larger than the width of a ridge between adjacent turns of the groove.