Patents Assigned to Otto-von-Guericke Universitaet Magdeburg
  • Patent number: 7173430
    Abstract: A cold cathode ionization manometer operating according to the inverse magnetron principle to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10?2 Pa and 1 Pa). To reduce the contamination and thus to extend the service life the measuring tube is provided with two separately controlled and axially displaced cathodes and a coaxially arranged common anode within a vacuum-proof housing.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: February 6, 2007
    Assignee: Otto-von-Guericke Universitaet Magdeburg
    Inventors: Christian Edelmann, Stefan Wilfert