Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

Abstract: The imaging mode presented here combines the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the second resonant drive frequency operates in FM mode and is adjusted to keep the phase at 90 degrees, on resonance. With this approach, frequency feedback on the second resonant mode and topographic feedback on the first are decoupled, allowing much more stable, robust operation.

Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Abstract: Techniques for coupling with devices that convert displacements into differential voltages and improve the sensitivity of such devices. A transducer operates based on changes of inductances between primary and secondary of a transformer to produce a differential signal that includes a noninverted signal and an inverted signal. A switch receives the noninverted signal and the inverted signal. A processor creates a square wave signal for driving the transducer input, and also digitally creates an inverted transducer output. A filter operates to filter the square wave output from the processor to produce a substantially single frequency signal at a specified timing having a specified phase relationship relative to the first phase inversion signal based on instructions that are executed by the processor.

Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.

Abstract: A new type of indenter is described. This device combines certain sensing and structural elements of atomic force microscopy with a module designed for the use of indentation probes, conventional diamond and otherwise, as well as unconventional designs, to produce high resolution and otherwise superior indentation measurements.

Abstract: Techniques for coupling with devices that convert displacements into differential voltages and improvement of the sensitivity of such devices. A transducer operates based on changes of inductances between primary and secondary of a transformer to produce a differential signal that includes a noninverted signal and an inverted signal. A switch receives the noninverted signal and the inverted signal. A processor creates a square wave signal for driving the transducer input, and also digitally creates an inverted transducer output. A filter operates to filter the square wave output from the processor to produce a substantially single frequency signal at a specified timing having a specified phase relationship relative to the first phase inversion signal based on instructions that are executed by the processor.

Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

Abstract: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently “perfect” in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.

Abstract: Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

Abstract: A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

Abstract: Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.

Abstract: A digital system for controlling the quality factor in a resonant device. The resonant device can be a a device that includes a cantilever within its system, such as an atomic force microscope. The quality factor can be digitally controlled to avoid noise effect in the analog components. A direct digital synthesizer implemented in a way that provides access to the output of the phase accumulator. That output is a number which usually drives a lookup table to produce a cosine or sine output wave. The output wave is created, but the number is also adjusted to form a second number that drives a second lookup table to create an adjustment factor to adjust the output from the cosine table. The adjusted digital signal than drives a DA converter which produces an output drive for the cantilever.

Abstract: An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.