Abstract: A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons (LLEs) received from a first region of the material due to interaction with the electron beam and generating corresponding LLE data. The method further comprises detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap, and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.

Abstract: A charged particle filter comprises a magnetic deflector and an outer shield. The magnetic deflector has a bore along an axis thereof passing through the deflector from a specimen end to a detector end of the deflector and through which charged particles pass when in use. The deflector is formed from one or more magnets positioned around the bore in a Halbach configuration thereby generating a relatively high magnetic field strength within the bore and a relatively low magnetic field strength outside of the deflector. The deflector has a geometry defining an outer surface and an inner surface, wherein each of the outer and inner surfaces of the deflector taper towards the axis as a respective function of distance in the specimen direction along the axis.

Abstract: A method of determining the feasibility of a proposed structure analysis process is disclosed. The process involved the electron beam excitation of x-rays from a multi-layered structure. The method comprises generating predicted x-ray data represents the x-ray excitation response of the multi-layered structure according to one or more sets of process conditions. The x-ray data are generated using structure data defining the structure and composition of the layers. The effects upon the x-ray data of changes to the structure data are then analysed in accordance with one or more predetermined feasibility criteria, so as to determine the feasibility of performing the proposed structure analysis process upon the multi-layered structure.

Abstract: A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to an incident energy beam. A dataset is also obtained, this comprising composition data of a plurality of materials. The material of the specimen is contained within the dataset. Predicted x-ray data are calculated for each of the materials in the dataset using the composition data. The obtained and the predicted x-ray data are compared and the likely identity of the material of the specimen is determined, based upon the comparison.

Abstract: A method of analyzing a dataset of spectra is provided in which each spectrum has a count value for each of a number of parameter values within a parameter range. The method is for identifying one or more parameter values that exhibit a significant variation within the dataset. A dataset of spectra is obtained and a statistical analysis is applied to the count values for each of the parameter values. The result of the analysis for each parameter value is a function of the variation in the count values. A spectrum that is representative of at least part of the dataset of spectra is then displayed together with the results of the statistical analysis. A corresponding computer program and system for performing the method are also disclosed.

Abstract: A solid state ionizing radiation detector is provided, having an absorber within which, when in use, electrical charge is generated upon the absorption of ionizing radiation. The absorber has a front face with an active region through which incident ionizing radiation is received. A front electrode is located at the front face. A rear electrode substantially covers a rear face of the absorber. The front and rear electrodes are arranged in use to generate an electric field in the absorber so as to collect the generated electrical charge. The area of the rear face is substantially smaller than that of the active region of the front face. At least part of the absorber within which the electric field is generated is bounded by substantially smooth and substantially tapered sidewalls.

Abstract: A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.

Abstract: A method of analyzing a dataset of spectra is provided in which each spectrum has a count value for each of a number of parameter values within a parameter range. The method is for identifying one or more parameter values that exhibit a significant variation within the dataset. A dataset of spectra is obtained and a statistical analysis is applied to the count values for each of the parameter values. The result of the analysis for each parameter value is a function of the variation in the count values. A spectrum that is representative of at least part of the dataset of spectra is then displayed together with the results of the statistical analysis. A corresponding computer program and system for performing the method are also disclosed.

Abstract: A solid state ionizing radiation detector is provided, having an absorber within which, when in use, electrical charge is generated upon the absorption of ionizing radiation. The absorber has a front face with an active region through which incident ionizing radiation is received. A front electrode is located at the front face. A rear electrode substantially covers a rear face of the absorber. The front and rear electrodes are arranged in use to generate an electric field in the absorber so as to collect the generated electrical charge. The area of the rear face is substantially smaller than that of the active region of the front face. At least part of the absorber within which the electric field is generated is bounded by substantially smooth and substantially tapered sidewalls.

Abstract: We provide an x-ray detector having a housing with one or more internal surfaces defining an internal volume. The housing is adapted in use to contain a vacuum within the internal volume. An x-ray sensor is located within the internal volume of the housing. A window, located within the housing, is adapted to permit the passage through the window of x-rays to be detected from the external environment to the sensor. A getter material is applied as a coating to the one or more internal surfaces, for absorbing gaseous species present within the vacuum and for substantially preventing outgassing from the parts of the walls coated by the getter material.

Abstract: A method of identifying a material using an x-ray emission characteristic is provided. X-ray data representing a monitored x-ray emission characteristic is obtained from a specimen in response to an incident energy beam. A dataset is also obtained, this comprising composition data of a plurality of materials. The material of the specimen is contained within the dataset. Predicted x-ray data are calculated for each of the materials in the dataset using the composition data. The obtained and the predicted x-ray data are compared and the likely identity of the material of the specimen is determined, based upon the comparison.

Abstract: A sample inspection apparatus comprises a sample support; a detection system for detecting radiation emitted by or transmitted through a sample on the sample support in response to radiation incident on the sample; and a cooling system for cooling at least one of the sample support and detection system. The cooling system includes at least one oscillating, mechanical component which oscillates at a frequency different from the at least one of the support and detection system.

Abstract: A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.

Abstract: A method of analyzing crystalline texture from data defining the orientation of crystals in a sample of polycrystalline material including, for each crystal, determining the orientation of a first direction in the sample, with respect to a common reference frame fixed to the crystal structure of each crystal. A number of crystals sharing a similar orientation of the first direction with respect to the reference frame is selected and for each, the orientation is determined of a second direction in the sample with respect to the reference frame. A number of crystals sharing a similar orientation of the second direction with respect to the reference frame is selected and a crystal texture corresponding to the orientation of the selected crystals with respect to the first and second directions within the sample is determined and/or represented.

Abstract: A method of analysing crystalline texture from data defining the orientation of crystals in a sample of polycrystalline material comprises, for each crystal, determining the orientation of a first direction in the sample, with respect to a common reference frame fixed to the crystal structure of each crystal. A number of crystals sharing a similar orientation of the first direction with respect to the reference frame are selected and for each, the orientation is determined of a second direction in the sample with respect to the reference frame. A number of crystals sharing a similar orientation of the second direction with respect to the reference frame are selected and a crystal texture corresponding to the orientation of the selected crystals with respect to the first and second directions within the sample is determined and/or represented.

Abstract: A detection system for detecting X-ray radiation from a sample located in a microbeam instrument. The detection system comprises: a. a pulse tube cooler; b. a compressor connected to the pulse tube cooler; c. a sensor coupled to the pulse tube cooler; and, d. a housing containing the pulse tube cooler and the sensor. The pulse tube cooler, the sensor and at least part of the housing are sufficiently small to be positioned inside the microbeam instrument in use, thereby allowing the X-ray radiation from the sample to be detected by the sensor.

Abstract: An electron detection device for use with an electron microscope defining a sample chamber. The device comprises a housing which in use is mounted to and opens into or forms part of a sample chamber of an electron microscope. A support structure is attached to the detection device housing and is in communication with the sample chamber in use. The support structure supports within it a member from which depends a phosphor scintillator, the member being movable between an extended position in which the phosphor scintillator is close enough to a sample to be struck by electrons and a retracted position. A control system controls movement of the member; and a detector monitors light emitted by the phosphor scintillator in response to electron impact.

Abstract: Apparatus for analysing a sample comprises: a. A radiation source for generating a radiation beam; b. A sample holder for holding the sample in use; c. A polariser for polarising the radiation beam; d. A radiation beam selector for selectively exposing the sample to either the radiation beam or the polarised radiation beam; and, e. A detector for detecting radiation emitted by the sample.