Patents Assigned to Oxford Instruments Nanotechnology Tools Limited
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Patent number: 11835279Abstract: There is provided a method of reducing noise in a cryogenic cooling system associated with a mechanical refrigerator forming part of said cooling system. The method comprises: monitoring vibrations in the cooling system during operation of the mechanical refrigerator; and modulating an operating frequency of the mechanical refrigerator based on the monitored vibrations so as to reduce the amplitude of said vibrations. This allows noise within the cooling system to be reduced.Type: GrantFiled: August 7, 2019Date of Patent: December 5, 2023Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: Anthony J. Matthews, Mark Patton, Jeremy White
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Patent number: 11798774Abstract: A system for preventing collisions between components in a particle beam instrument is disclosed. The system is particularly beneficial in use with instruments wherein moveable components are used within a chamber that obscures them from being viewed from outside the chamber. The system comprises: a capacitance sensor configured to monitor the capacitance between a first component and a second component of the instrument, and a proximity module configured to: derive a capacitance parameter from the monitored capacitance between the first component and the second component; and output a proximity alert signal in accordance with a comparison between the derived capacitance parameter and a predetermined capacitance parameter threshold value.Type: GrantFiled: July 16, 2021Date of Patent: October 24, 2023Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: Stuart Andrew Swan, Grigore Moldovan, Angus Bewick
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Patent number: 11688582Abstract: A method and system for analyzing a specimen in a microscope are disclosed.Type: GrantFiled: July 19, 2018Date of Patent: June 27, 2023Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: Anthony Hyde, James Holland, Simon Burgess, Peter Statham, Philippe Pinard, James Corrin
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Patent number: 11333404Abstract: A cryogenic cooling system is provided comprising: a mechanical refrigerator, a heat pipe and a heat switch assembly. The mechanical refrigerator has a first cooled stage and a second cooled stage. The heat pipe has a first part coupled thermally to the second cooled stage and a second part coupled thermally to a target assembly. The heat pipe is adapted to contain a condensable gaseous coolant when in use. The heat switch assembly comprises one or more gas gap heat switches, a first end coupled thermally to the second cooled stage and a second end coupled thermally to the target assembly. The cryogenic cooling system is adapted to be operated in a heat pipe cooling mode in which the temperature of the second cooled stage is lower than the first cooled stage and wherein the temperature of the target assembly causes the coolant within the second part of the heat pipe to be gaseous and the temperature of the second cooled stage causes the coolant in the first part of the heat pipe to condense.Type: GrantFiled: June 14, 2019Date of Patent: May 17, 2022Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: Anthony Matthews, Mark Patton
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Patent number: 11195692Abstract: A method and system for processing a diffraction pattern image obtained in an electron microscope are disclosed.Type: GrantFiled: September 28, 2018Date of Patent: December 7, 2021Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: Peter Statham, Angus Bewick
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Patent number: 11139137Abstract: A system for preventing collisions between components in a particle beam instrument is disclosed. The system is particularly beneficial in use with instruments wherein moveable components are used within a chamber that obscures them from being viewed from outside the chamber. The system comprises: a capacitance sensor configured to monitor the capacitance between a first component and a second component of the instrument, and a proximity module configured to: derive a capacitance parameter from the monitored capacitance between the first component and the second component; and output a proximity alert signal in accordance with a comparison between the derived capacitance parameter and a predetermined capacitance parameter threshold value.Type: GrantFiled: August 9, 2018Date of Patent: October 5, 2021Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: Stuart Andrew Swan, Grigore Moldovan, Angus Bewick
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Patent number: 11125475Abstract: A cryogenic cooling system is provided comprising a first stage 6, a second stage 7, and a third stage 8, wherein the second stage 7 is arranged between the first stage 6 and the third stage 8. A first dilution unit 12 is provided comprising a first still 11 and a first mixing chamber 13, wherein the first still 11 is thermally coupled to the first stage 6 and the first mixing chamber 13 is thermally coupled to the third stage 8. A second dilution unit 32 is further provided comprising a second still 31 and a second mixing chamber 33, wherein the second still 31 is thermally coupled to the first stage 6 and the second mixing chamber 33 is thermally coupled to the second stage 7.Type: GrantFiled: March 24, 2020Date of Patent: September 21, 2021Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Anthony Matthews
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Patent number: 10942234Abstract: A cryogenic refrigeration system is provided having particular application in cooling a Magnetic Resonance Imaging system. The cryogenic refrigeration system comprises a conduit arranged as a cooling circuit through which a coolant fluid is pumped, the conduit being in thermal communication with a least one cooled stage for cooling the coolant fluid to a first temperature, and wherein the conduit comprises a cryotrap in communication with the coolant fluid, the cryotrap being operable to remove contaminants from the coolant fluid by cryogenic pumping. The conduit further comprises a flow impedance for cooling the coolant fluid to a second temperature lower than the first temperature, and a hydrogen filter upstream of the flow impedance and in communication with the coolant fluid, the hydrogen filter being cooled to a temperature below the freezing point of hydrogen in the coolant fluid and operable to remove contaminant hydrogen from the coolant fluid.Type: GrantFiled: April 19, 2013Date of Patent: March 9, 2021Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: John Garside, Timothy John Foster
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Patent number: 10852051Abstract: A method for forming a gas gap heat switch is provided comprising the following steps: (a) providing first and second conductors, and first and second connecting members, wherein the connecting members each have a thermal conductivity at least five times smaller than that of the conductors when at a temperature of 100K; (b) fusing the first conductor to the first connecting member and the second conductor to the second connecting member; (c) aligning the conductors such that the first and second conductors extend along a common major axis; (d) bringing proximal ends of the aligned conductors into contact with each other when said conductors are at a first temperature; and (e) joining the first connecting member to the second connecting member so as to form a chamber around at least the proximal ends of the conductors.Type: GrantFiled: June 5, 2017Date of Patent: December 1, 2020Assignee: Oxford Instruments Nanotechnology Tools LimitedInventor: Anthony Matthews
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Patent number: 10663414Abstract: A method is provided for performing electron diffraction pattern analysis upon a sample in a vacuum chamber of a microscope. Firstly a sample is isolated from part of a specimen using a focused particle beam. A manipulator end effector is then attached to the sample so as to effect a predetermined orientation between the end effector and the sample. With the sample detached, the manipulator end effector is rotated about a rotation axis to bring the sample into a predetermined geometry with respect to an electron beam and diffraction pattern imaging apparatus so as to enable an electron diffraction pattern to be obtained from the sample while the sample is still fixed to the manipulator end effector. An electron beam is caused to impinge upon the sample attached to the manipulator end effector so as to obtain an electron diffraction pattern.Type: GrantFiled: March 10, 2014Date of Patent: May 26, 2020Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Frank Willi Bauer
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Patent number: 10627424Abstract: A cryogenic cooling system can include a cooling device and a sample holder. The system can also include a first optical member having a first aperture and a first collimator, where the first collimator is positioned to collimate the light. The system can further include a second optical member having a second aperture and a second collimator where the second collimator is positioned to collimate the light, the first optical member being mounted to the cooling device and the second optical member being mounted to the sample holder. When the sample holder is mounted to the cooling device, a relative position of the first optical member and the second optical member allows the light to pass between the first and second apertures via the first collimator and second collimator separated by a physical gap to allow optical communication between the first optical member and the second optical member.Type: GrantFiled: May 26, 2017Date of Patent: April 21, 2020Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Mark Patton
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Patent number: 10527563Abstract: A method and apparatus for analysis of a specimen in a microscope are provided. A first survey is performed that collects analytical data from a region of interest on the specimen surface using a first set of conditions. A second survey is performed that collects additional analytical data from selected parts of the region of interest on the specimen surface using a second set of conditions, different from the first set of conditions. The analytical data from the first survey is used to select the parts used for data collection in the second survey and to decide the order in which they are used.Type: GrantFiled: May 9, 2017Date of Patent: January 7, 2020Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: Christian Lang, James Corrin
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Patent number: 10473375Abstract: Apparatus for controlling a cryogenic cooling system is described. A supply gas line (3A) and a return gas line (3B) are provided which are coupled to a compressor (1) and to a mechanical refrigerator (2) via a coupling element (4). The coupling element is in gaseous communication with the supply (2A) and return gas lines and supplies gas to the mechanical refrigerator (2). The pressure of the supplied gas is modulated by the coupling element in a cyclical manner. A pressure sensing apparatus (6) monitors the pressure in at least one of the supply and return gas lines. A control system (5) is used to modulate the frequency of the cyclical gas pressure supplied by the coupling element in accordance with the pressure monitored by the pressure sensing apparatus. An associated method of controlling such a system is also described.Type: GrantFiled: September 27, 2012Date of Patent: November 12, 2019Assignee: Oxford Instruments Nanotechnology Tools LimitedInventors: John Garside, Matthias Buehler, Daniels Tortorella, Xing Yuan
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Publication number: 20190338996Abstract: A method for forming a gas gap heat switch is provided comprising the following steps: (a) providing first and second conductors, and first and second connecting members, wherein the connecting members each have a thermal conductivity at least five times smaller than that of the conductors when at a temperature of 100K; (b) fusing the first conductor to the first connecting member and the second conductor to the second connecting member; (c) aligning the conductors such that the first and second conductors extend along a common major axis; (d) bringing proximal ends of the aligned conductors into contact with each other when said conductors are at a first temperature; and (e) joining the first connecting member to the second connecting member so as to form a chamber around at least the proximal ends of the conductors.Type: ApplicationFiled: June 5, 2017Publication date: November 7, 2019Applicant: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Anthony MATTHEWS
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Publication number: 20190310283Abstract: A cryogenic cooling system can include a cooling device and a sample holder. The system can also include a first optical member having a first aperture and a first collimator, where the first collimator is positioned to collimate the light. The system can further include a second optical member having a second aperture and a second collimator where the second collimator is positioned to collimate the light, the first optical member being mounted to the cooling device and the second optical member being mounted to the sample holder. When the sample holder is mounted to the cooling device, a relative position of the first optical member and the second optical member allows the light to pass between the first and second apertures via the first collimator and second collimator separated by a physical gap to allow optical communication between the first optical member and the second optical member.Type: ApplicationFiled: May 26, 2017Publication date: October 10, 2019Applicant: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Mark Patton
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Patent number: 10354834Abstract: An x-ray analysis apparatus comprises an electron beam assembly for generating a focused electron beam within a first gas pressure environment. A sample assembly is used for retaining a sample within a second gas pressure environment such that the sample receives the electron beam from the electron beam assembly and such that the gas pressure in the second gas pressure environment is greater than the gas pressure within the first gas pressure environment. An x-ray detector is positioned so as to have at least one x-ray sensor element within the first gas pressure environment. The sensor element is mounted to a part of the electron beam assembly which is proximal to the sample assembly and further arranged in use to receive x-rays generated by the interaction between the electron beam and the sample.Type: GrantFiled: June 8, 2017Date of Patent: July 16, 2019Assignee: Oxford Instruments Nanotechnology Tools LimitedInventor: Peter J. Statham
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Patent number: 10258253Abstract: A cryogenic cooling apparatus comprises a supply gas line and a return gas line adapted to be coupled to a compressor. A coupling element is positioned in gaseous communication with the supply and return gas lines, the coupling element being adapted in use to supply gas to a mechanical refrigerator so that the pressure of said supplied gas is modulated by the coupling element in a cyclical manner. A sensing system is used to monitor the operational state of the mechanical refrigerator and a control system modulates the frequency of the cyclical gas pressure supplied by the coupling element in accordance with the monitored operational state. The mechanical refrigerator has a first cooled stage and a second cooled stage, the second cooled stage being adapted to be coupled thermally with target apparatus to be cooled.Type: GrantFiled: April 19, 2013Date of Patent: April 16, 2019Assignee: Oxford Instruments Nanotechnology Tools LimitedInventor: John Garside
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Patent number: 10162023Abstract: A pulse tube refrigerator (PTR) comprising a pedestal head and a regenerator tube assembly is provided having particular application in cooling a Magnetic Resonance Imaging system. The PTR comprises a pedestal head and at least one cooled stage, the at least one cooled stage being mounted to a distal end, with respect to the pedestal head, of each of an associated regenerator tube and an associated pulse tube, the associated regenerator tube and associated pulse tube together providing pressurized coolant gas to the at least one cooled stage, wherein the associated regenerator tube and the associated pulse tube are elongate along substantially parallel axes; and further arranged, wherein, the displacements of the distal ends of each of the associated regenerator tube and the associated pulse tube in response to the cyclical changes in coolant pressure, are substantially the same when the pulse tube refrigerator is in use.Type: GrantFiled: April 19, 2013Date of Patent: December 25, 2018Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: Matthias Buehler, Theo Hertrich, John Garside, Dieter Jedamzik
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Patent number: 10139138Abstract: An assembly for operating a cryocooler pedestal is provided. The assembly is operable when in use to provide a cryocooler pedestal with cyclical gaseous connection to high pressure and low pressure gas supply lines, and has a return conduit through which gas is caused to flow from the cryocooler pedestal into the low pressure supply line. The assembly further comprises a dispersion chamber adjacent the return conduit and in flow communication therewith through a plurality of orifices so as to reduce acoustic noise. The assembly has particular application in cooling a Magnetic Resonance Imaging system.Type: GrantFiled: April 29, 2013Date of Patent: November 27, 2018Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventors: John Garside, Matthias Buehler, Dieter Jedamzik
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Patent number: 10054557Abstract: A method is provided of measuring the mass thickness of a target sample for use in electron microscopy. Reference data are obtained which is representative of the X-rays (28) generated within a reference sample (12) when a particle beam (7) is caused to impinge upon a region (14) of the reference sample (12). The region (14) is of a predetermined thickness of less than 300 nm and has a predetermined composition. The particle beam (7) is caused to impinge upon a region (18) of the target sample (16). The resulting X-rays (29) generated within the target sample (16) are monitored (27) so as to produce monitored data. Output data are then calculated based upon the monitored data and the reference data, the output data including the mass thickness of the region (18) of the target sample (16).Type: GrantFiled: July 29, 2015Date of Patent: August 21, 2018Assignee: OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITEDInventor: Peter Statham